Technical Sessions
Boston Park Plaza
Grand Ballroom A

Technical Session 1 – Controls and Mechatronics I
Session Co-chairs: David L. Trumper (Massachusetts Institute of Technology) and Lei Zhou (University of Wisconsin-Madison)
Wednesday, November 15, 2023
8:00 AM – 9:45 AM

  1. Piezoelectric Wafer Stage Based on Highly Variable Viscoelastic Stiffness
    R.G.C. de Bruijn, J.P.M.B. Vermeulen (Eindhoven University of Technology); J.J.M. van de Wijdeven (ASML)
  2. Force Ripple Suppression Method for Permanent Magnet Linear Synchronous Motors
    Sangmin Lee, Yoon Sik Kwon, Jun Young Yoon (Yonsei University)
  3. The Potential of Active Vibration Isolation Systems
    Sil T. Spanjer, Hakan Köroğlu, Wouter B.J. Hakvoort (University of Twente)
  4. Real-time Reference Trajectory Governor for 2-Axis Dual-Stage Equipped Motion Systems
    Shingo Tajima (Tokyo Institute of Technology); Burak Sencer (Oregon State University)
  5. Design and Control of Low-power 6-DOF Hybrid-reluctance-type Magnetic Levitator
    Hyeong Min Yoon, Jong Min Sung, Jae Woo Jung, Eun Kyu Kim, Jeong Min Park, Jun Young Yoon (Yonsei University)

Commercial Presentations: MPS USA, Inc., Prior Scientific/Queensgate, Attocube Systems, NTS Group USA LLC

Technical Session 2 – Precision Manufacturing
Session Co-chairs: Dan E. Luttrell (Kriterion, LLC) and Byron R. Knapp (Professional Instruments Company)
Wednesday, November 15, 2023
10:15 AM – 12:00 Noon

  1. Nanometer Level Surface Correction for Fine Optics
    Jacob P. Guymon, Tyler Young, Mark Pankow (North Carolina State University)
  2. Precision Workpiece Positioning in Diamond Turning Using Multi-Axis Motion
    Alex Sohn (Meta Reality Labs); Neil Naples (Precitech, Inc.)
  3. Adaptive Tool Path Planning for Ultra-precision Turning of Freeform Fresnel Optics
    Yaoke Wang, Ping Guo (Northwestern University)
  4. Experimental Investigation of Laser-Assisted Diamond Turning Machining on Tungsten Carbide
    Sai K. Kode, Rohit Sharma, Hassan Shirzadi Jahromi, Jonathan D. Ellis (Micro-Lam Inc.)
  5. Advancing the Manufacturability of 6H- Silicon Carbide through Hybrid Laser- and Subtractive Machining
    Marvin Groeb (Kern Microtechnik GmbH); Rodolphe Catrin (RhySearch); Johann Groeb (Independent Researcher)

Commercial Presentations: Chardon Tool, Micro-LAM, Inc., Carl Zeiss Industrial Quality Solutions, LLC

Technical Session 3 – Metrology Systems
Session Co-chairs: Felipe Guzman (Texas A&M University) and Steven R. Gillmer (MIT Lincoln Laboratory)
Wednesday, November 15, 2023
1:30 PM – 3:15 PM

  1. A Second Generation Table Top Kibble Balance
    John Draganov, Leon Chao, Zane Comden, Kumar Arumugam, Thapelo Mametja, Stephan Schlamminger, Frank Seifert, David Newell (National Institute of Standards and Technology)
  2. An Si-Traceable Torque Realization Device with a Range Up to One Newton Meter
    Zane Comden, John Draganov, Stephan Schlamminger, Frank Seifert, David Newell, Leon Chao (National Institute of Standards and Technology)
  3. Beware of Thermal Effects in Precision Measurements
    S. Schlamminger, L. Chao, V. Lee, D.B. Newell (National Institute of Standards and Technology); R. Cochrane, C.C. Speake (Formerly Imperial College London)
  4. High-Precision Stress Measurement in Thin Films
    Mallory M. Whalen, Ralf K. Heilmann, Mark L. Schattenburg (Massachusetts Institute of Technology)
  5. 6 Degree-of-Freedom Force-Torque Sensor Based on Electromagnetic Force Compensation
    Yeeun Bae, Kyung-Taek Yoon, Hyunho Lim, Young-Man Choi (Ajou University)

Commercial Presentations: UNC-Charlotte, Optical Perspectives Group, Vermont Photonics Technologies Corp., Zygo-Ametek, SIOS Meßtechnik GmbH

Technical Session 4 – Micro-Nano Technologies
Session Co-chairs: Michael A. Cullinan (The University of Texas at Austin) and Robert M. Panas (Bright Silicon Technologies)
Thursday, November 16, 2023
8:00 AM – 9:45 AM

  1. Multi-Material 3D Nanofabrication Based on Ultrafast Lasers and Swellable Hydrogels
    Songyun Gu, Fei Han, Minxin Ye, Shih-Chi Chen (The Chinese University of Hong Kong)
  2. Dynamic Optical Surface Control with the Lightfield Directing Array
    Robert M. Panas (Bright Silicon Technologies)
  3. Roll-to-Roll Nanoimprint Lithography with Sub-50 nm Features and Sub-25 nm Residual Layer Thickness
    Parth N. Pandya, Shrawan Singhal, Ovadia Abed, S.V. Sreenivasan (The University of Texas at Austin)
  4. A Micro Electromechanical Systems Approach to Highspeed Scanning Tunneling Microscopy
    Liam G. Connolly, Taekyung Kim, Jason J. Gorman (National Institute of Standards and Technology)
  5. Micro-Mechanical AND Gate Kinematics, Energetics and Dynamics
    Hilary A. Johnson, Logan Bekker, John Cortes, Andrew J. Pascall (Lawrence Livermore National Laboratory); Robert M. Panas (Bright Silicon Technologies, LLC); Jonathan B. Hopkins, Amin Farzaneh, Melik, Ahmadi (University of California Los Angeles)

Commercial Presentations: AMETEK Precitech Inc., Moore Nanotechnology Systems, LLC, Polytec, Inc., N. C. State University

Technical Session 5 – Precision Design 1
Session Co-chairs: Evan P. Mosier (Aerotech, Inc.) and Alexander H. Slocum (Massachusetts Institute of Technology)
Thursday, November 16, 2023
10:15 AM – 12:00 Noon

  1. Development of a Non-resonant Eddy Current Rate Limited Clock Mechanism
    Michael R. Everman (Bell-Everman, Inc.)
  2. T-FLEX LC: A Flexure-Based Hexapod with a Simplified Kinematic Structure
    Tim M. Koers, Marijn Nijenhuis, Dannis M. Brouwer (University of Twente)
  3. Design, Fabrication, and Testing of Composite Coupons with Post-fabrication Tailorable Thermal Expansion
    Brandon D. Chalifoux, Trevor R. Schlack, Pierre R. Nicolas, Ian J. Arnold (University of Arizona)
  4. Modeling Porous Graphite Air Bearing Stiffness with ANSYS Fluent
    Jason E. Barbeiro (KLA Corporation)
  5. A Diamond Turning Machine Made Feature with Cosine Bumps and Grooves for Optics Assembly
    Chunjie Fan, Alex Sohn (Meta Reality Labs)

Commercial Presentations: New Way Air Bearings, Professional Instruments Company, Starrett Tru-Stone Technologies, Cranfield Precision – Fives Landis Ltd, Levicron GmbH, Schneider GmbH & Co. KG

Technical Session 6 – Controls and Mechatronics II
Session Co-chairs: Stephen J. Ludwick (Aerotech, Inc.) and Michel Pharand (KLA Corporation)
Thursday, November 16, 2023
1:30 PM – 3:15 PM

  1. Active Damping of Position Dependent Parasitic Resonances in Flexure Mechanisms
    Bram Seinhorst, Marijn Nijenhuis, Wouter B.J. Hakvoort (University of Twente)
  2. FleXstage: Lightweight Magnetically Levitated Precision Stage with Over-Actuation Towards High-Throughput IC Manufacturing
    Jingjie Wu, Lei Zhou (University of Wisconsin-Madison)
  3. A PCB Coil-based Magnetically Levitated Nanopositioning Stage with Centimeter-range XYZ Motion
    Ian Heyman (The University of Texas at Austin), Malek Ibrahim (Massachusetts Institute of Technology), Lei Zhou (University of Wisconsin-Madison)
  4. System Level Design of a Bearingless Pump
    Krishan Kant, David L. Trumper (Massachusetts Institute of Technology)

Commercial Presentations: Aerotech, Inc., VDL Enabling Technologies Group, Lion Precision, ALIO Industries

Technical Session 7 – Precision Design II
Friday, November 17, 2023

Session Co-chairs: Leon Chao and Kumar Arumugam (National Institute of Standards and Technology)
8:00 AM – 9:45 AM

  1. Program for Design of Accurate Kinematic Couplings
    Alexander Slocum (Massachusetts Institute of Technology), Michel Pharand (KLA), Tyler Seawright (San Jose State University)
  2. Development and Realization of a Rotating Maglev Sample Manipulator
    M. Wijnhoven, R. Faassen, L. Koorneef, D. Laro, M. Princen, T. Ruijl (MI-Partners)
  3. Building a 0.8 NA Microfield Exposure EUV Lithography Tool
    Dmytro Zaytsev, Arnaud Allézy, Chris Anderson, Ryan Miyakawa, Senajith Rekawa (Lawrence Berkeley National Laboratory)
  4. Force Balancing a 1-DOF Positioning Stage to Maximize External Vibration Rejection
    Vinayak J. Kalas, Francesco Patti, Johannes M. Vogels (VDL ETG Technology & Development); Jan J. de Jong (University of Twente)
  5. Flexure Systems for 4th Generation Light Source Liquid-nitrogen-cooled X-ray Mirrors
    Kyle La Fleche, Maxime Bergeret, Christopher Huschke, Arnaud Allézy (Lawrence Berkeley National Laboratory)

Technical Session 8 – Precision Engineering Medley
Session Co-chairs: Jimmie A. Miller (University of North Carolina – Charlotte) and Alex Sohn (Meta Reality Labs)
Friday, November 17, 2023
10:15 AM – 12:00 Noon

  1. The Importance of Precision to Mechanical Neural Networks that Learn Behaviors
    Pietro Sainaghi, Ryan H. Lee, Jonathan B. Hopkins (University of California, Los Angeles)
  2. High-precision Spectrum-encoded 3D Imaging System with a Free-running Dual-comb Laser
    Yalan Yu, Zhiwei Zhu, Zixu Feng, Shih-Chi Chen (The Chinese University of Hong Kong)
  3. Atomically Precise High-throughput Ablation of Gold via Projection of Femtosecond Light Sheets
    Harnjoo Kim, Rugile Zilenaite, Sourabh K. Saha (Georgia Institute of Technology)
  4. Sub-Picometer-Resolution Transmission Grating Spectrograph for X-Ray Astronomy
    Ralf K. Heilmann, Mark L. Schattenburg (Massachusetts Institute of Technology); Alexander R. Bruccoleri (Izentis, LLC)