Technical Sessions
Boston Park Plaza
Grand Ballroom A
Technical Session 1 – Controls and Mechatronics I
Session Co-chairs: David L. Trumper (Massachusetts Institute of Technology) and Lei Zhou (University of Wisconsin-Madison)
Wednesday, November 15, 2023
8:00 AM – 9:45 AM
- Piezoelectric Wafer Stage Based on Highly Variable Viscoelastic Stiffness
R.G.C. de Bruijn, J.P.M.B. Vermeulen (Eindhoven University of Technology); J.J.M. van de Wijdeven (ASML) - Force Ripple Suppression Method for Permanent Magnet Linear Synchronous Motors
Sangmin Lee, Yoon Sik Kwon, Jun Young Yoon (Yonsei University) - The Potential of Active Vibration Isolation Systems
Sil T. Spanjer, Hakan Köroğlu, Wouter B.J. Hakvoort (University of Twente) - Real-time Reference Trajectory Governor for 2-Axis Dual-Stage Equipped Motion Systems
Shingo Tajima (Tokyo Institute of Technology); Burak Sencer (Oregon State University) - Design and Control of Low-power 6-DOF Hybrid-reluctance-type Magnetic Levitator
Hyeong Min Yoon, Jong Min Sung, Jae Woo Jung, Eun Kyu Kim, Jeong Min Park, Jun Young Yoon (Yonsei University)
Commercial Presentations: MPS USA, Inc., Prior Scientific/Queensgate, Attocube Systems, NTS Group USA LLC
Technical Session 2 – Precision Manufacturing
Session Co-chairs: Dan E. Luttrell (Kriterion, LLC) and Byron R. Knapp (Professional Instruments Company)
Wednesday, November 15, 2023
10:15 AM – 12:00 Noon
- Nanometer Level Surface Correction for Fine Optics
Jacob P. Guymon, Tyler Young, Mark Pankow (North Carolina State University) - Precision Workpiece Positioning in Diamond Turning Using Multi-Axis Motion
Alex Sohn (Meta Reality Labs); Neil Naples (Precitech, Inc.) - Adaptive Tool Path Planning for Ultra-precision Turning of Freeform Fresnel Optics
Yaoke Wang, Ping Guo (Northwestern University) - Experimental Investigation of Laser-Assisted Diamond Turning Machining on Tungsten Carbide
Sai K. Kode, Rohit Sharma, Hassan Shirzadi Jahromi, Jonathan D. Ellis (Micro-Lam Inc.) - Advancing the Manufacturability of 6H- Silicon Carbide through Hybrid Laser- and Subtractive Machining
Marvin Groeb (Kern Microtechnik GmbH); Rodolphe Catrin (RhySearch); Johann Groeb (Independent Researcher)
Commercial Presentations: Chardon Tool, Micro-LAM, Inc., Carl Zeiss Industrial Quality Solutions, LLC
Technical Session 3 – Metrology Systems
Session Co-chairs: Felipe Guzman (Texas A&M University) and Steven R. Gillmer (MIT Lincoln Laboratory)
Wednesday, November 15, 2023
1:30 PM – 3:15 PM
- A Second Generation Table Top Kibble Balance
John Draganov, Leon Chao, Zane Comden, Kumar Arumugam, Thapelo Mametja, Stephan Schlamminger, Frank Seifert, David Newell (National Institute of Standards and Technology) - An Si-Traceable Torque Realization Device with a Range Up to One Newton Meter
Zane Comden, John Draganov, Stephan Schlamminger, Frank Seifert, David Newell, Leon Chao (National Institute of Standards and Technology) - Beware of Thermal Effects in Precision Measurements
S. Schlamminger, L. Chao, V. Lee, D.B. Newell (National Institute of Standards and Technology); R. Cochrane, C.C. Speake (Formerly Imperial College London) - High-Precision Stress Measurement in Thin Films
Mallory M. Whalen, Ralf K. Heilmann, Mark L. Schattenburg (Massachusetts Institute of Technology) - 6 Degree-of-Freedom Force-Torque Sensor Based on Electromagnetic Force Compensation
Yeeun Bae, Kyung-Taek Yoon, Hyunho Lim, Young-Man Choi (Ajou University)
Commercial Presentations: UNC-Charlotte, Optical Perspectives Group, Vermont Photonics Technologies Corp., Zygo-Ametek, SIOS Meßtechnik GmbH
Technical Session 4 – Micro-Nano Technologies
Session Co-chairs: Michael A. Cullinan (The University of Texas at Austin) and Robert M. Panas (Bright Silicon Technologies)
Thursday, November 16, 2023
8:00 AM – 9:45 AM
- Multi-Material 3D Nanofabrication Based on Ultrafast Lasers and Swellable Hydrogels
Songyun Gu, Fei Han, Minxin Ye, Shih-Chi Chen (The Chinese University of Hong Kong) - Dynamic Optical Surface Control with the Lightfield Directing Array
Robert M. Panas (Bright Silicon Technologies) - Roll-to-Roll Nanoimprint Lithography with Sub-50 nm Features and Sub-25 nm Residual Layer Thickness
Parth N. Pandya, Shrawan Singhal, Ovadia Abed, S.V. Sreenivasan (The University of Texas at Austin) - A Micro Electromechanical Systems Approach to Highspeed Scanning Tunneling Microscopy
Liam G. Connolly, Taekyung Kim, Jason J. Gorman (National Institute of Standards and Technology) - Micro-Mechanical AND Gate Kinematics, Energetics and Dynamics
Hilary A. Johnson, Logan Bekker, John Cortes, Andrew J. Pascall (Lawrence Livermore National Laboratory); Robert M. Panas (Bright Silicon Technologies, LLC); Jonathan B. Hopkins, Amin Farzaneh, Melik, Ahmadi (University of California Los Angeles)
Commercial Presentations: AMETEK Precitech Inc., Moore Nanotechnology Systems, LLC, Polytec, Inc., N. C. State University
Technical Session 5 – Precision Design 1
Session Co-chairs: Evan P. Mosier (Aerotech, Inc.) and Alexander H. Slocum (Massachusetts Institute of Technology)
Thursday, November 16, 2023
10:15 AM – 12:00 Noon
- Development of a Non-resonant Eddy Current Rate Limited Clock Mechanism
Michael R. Everman (Bell-Everman, Inc.) - T-FLEX LC: A Flexure-Based Hexapod with a Simplified Kinematic Structure
Tim M. Koers, Marijn Nijenhuis, Dannis M. Brouwer (University of Twente) - Design, Fabrication, and Testing of Composite Coupons with Post-fabrication Tailorable Thermal Expansion
Brandon D. Chalifoux, Trevor R. Schlack, Pierre R. Nicolas, Ian J. Arnold (University of Arizona) - Modeling Porous Graphite Air Bearing Stiffness with ANSYS Fluent
Jason E. Barbeiro (KLA Corporation) - A Diamond Turning Machine Made Feature with Cosine Bumps and Grooves for Optics Assembly
Chunjie Fan, Alex Sohn (Meta Reality Labs)
Commercial Presentations: New Way Air Bearings, Professional Instruments Company, Starrett Tru-Stone Technologies, Cranfield Precision – Fives Landis Ltd, Levicron GmbH, Schneider GmbH & Co. KG
Technical Session 6 – Controls and Mechatronics II
Session Co-chairs: Stephen J. Ludwick (Aerotech, Inc.) and Michel Pharand (KLA Corporation)
Thursday, November 16, 2023
1:30 PM – 3:15 PM
- Active Damping of Position Dependent Parasitic Resonances in Flexure Mechanisms
Bram Seinhorst, Marijn Nijenhuis, Wouter B.J. Hakvoort (University of Twente) - FleXstage: Lightweight Magnetically Levitated Precision Stage with Over-Actuation Towards High-Throughput IC Manufacturing
Jingjie Wu, Lei Zhou (University of Wisconsin-Madison) - A PCB Coil-based Magnetically Levitated Nanopositioning Stage with Centimeter-range XYZ Motion
Ian Heyman (The University of Texas at Austin), Malek Ibrahim (Massachusetts Institute of Technology), Lei Zhou (University of Wisconsin-Madison) - System Level Design of a Bearingless Pump
Krishan Kant, David L. Trumper (Massachusetts Institute of Technology)
Commercial Presentations: Aerotech, Inc., VDL Enabling Technologies Group, Lion Precision, ALIO Industries
Technical Session 7 – Precision Design II
Friday, November 17, 2023
Session Co-chairs: Leon Chao and Kumar Arumugam (National Institute of Standards and Technology)
8:00 AM – 9:45 AM
- Program for Design of Accurate Kinematic Couplings
Alexander Slocum (Massachusetts Institute of Technology), Michel Pharand (KLA), Tyler Seawright (San Jose State University) - Development and Realization of a Rotating Maglev Sample Manipulator
M. Wijnhoven, R. Faassen, L. Koorneef, D. Laro, M. Princen, T. Ruijl (MI-Partners) - Building a 0.8 NA Microfield Exposure EUV Lithography Tool
Dmytro Zaytsev, Arnaud Allézy, Chris Anderson, Ryan Miyakawa, Senajith Rekawa (Lawrence Berkeley National Laboratory) - Force Balancing a 1-DOF Positioning Stage to Maximize External Vibration Rejection
Vinayak J. Kalas, Francesco Patti, Johannes M. Vogels (VDL ETG Technology & Development); Jan J. de Jong (University of Twente) - Flexure Systems for 4th Generation Light Source Liquid-nitrogen-cooled X-ray Mirrors
Kyle La Fleche, Maxime Bergeret, Christopher Huschke, Arnaud Allézy (Lawrence Berkeley National Laboratory)
Technical Session 8 – Precision Engineering Medley
Session Co-chairs: Jimmie A. Miller (University of North Carolina – Charlotte) and Alex Sohn (Meta Reality Labs)
Friday, November 17, 2023
10:15 AM – 12:00 Noon
- The Importance of Precision to Mechanical Neural Networks that Learn Behaviors
Pietro Sainaghi, Ryan H. Lee, Jonathan B. Hopkins (University of California, Los Angeles) - High-precision Spectrum-encoded 3D Imaging System with a Free-running Dual-comb Laser
Yalan Yu, Zhiwei Zhu, Zixu Feng, Shih-Chi Chen (The Chinese University of Hong Kong) - Atomically Precise High-throughput Ablation of Gold via Projection of Femtosecond Light Sheets
Harnjoo Kim, Rugile Zilenaite, Sourabh K. Saha (Georgia Institute of Technology) - Sub-Picometer-Resolution Transmission Grating Spectrograph for X-Ray Astronomy
Ralf K. Heilmann, Mark L. Schattenburg (Massachusetts Institute of Technology); Alexander R. Bruccoleri (Izentis, LLC)