Prof. S.V. Sreenivasan (NASCENT Center, The University of Texas at Austin)

Title: Nanomanufacturing Enabled by Precision Systems, In-Situ Metrology and Real-Time Control

Translating novel nanoscale manufacturing concepts from research to commercially viable technologies has proven to be very challenging. This is due to the complexity of these systems and lack of system-level models that are essential for efficient design and control of reliable manufacturing processes. Such nanomanufacturing development efforts typically involve prolonged iterative experimental investigations prior to successful deployment. This presentation will discuss ongoing research related to several nanomanufacturing systems being investigated at the NASCENT Center. In each case, the presentation will discuss precision sub-systems that enable the process technology, in-situ sensing, and control approaches used to achieve reliable process behavior.

Common challenges across these nanomanufacturing systems include: (i) lack of reliable and validated system-level models; (ii) multi-scale physics coupled with parameter uncertainty; and (iii) incomplete in-situ sensing that creates gaps in system understanding. This talk will discuss the use of in-situ metrology and evolutionary computational algorithms to estimate system models, and to create optimal control techniques that enable reliable manufacturing processes. Exemplar manufacturing systems that will be discussed include: (i) advanced process control in nanoimprint lithography steppers to achieve sub-3nm overlay; (ii) precision sub-systems and metrology in the development of continuous roll-to-roll nanoimprint lithography; (iii) an order of magnitude enhancement in volume resolution (down to about 300 femtoliters) in high speed multi-nozzle piezo inkjet systems; and (iv) precision sub-systems and metrology in the development sub-100nm deep silicon electrochemical etching.


Prof. S.V. Sreenivasan’s research focuses on creating scalable nanofabrication technologies that enable novel devices in electronics, displays, and healthcare sectors. He currently serves as the director of the NSF funded NASCENT Engineering Research Center. He has received several awards for his work including the Technology Pioneer Award from the World Economic Forum, the ASME Leonardo da Vinci Award, the ASME William T. Ennor Award, and the ASME Machine Design Award. He was named a fellow of the National Academy of Inventors in 2017. Dr. Sreenivasan founded Molecular Imprints Inc. (MII), a nanopatterning spin out from UT-Austin that has resulted in commercial products in the semiconductor and display industries. He currently serves as the Chief Technologist of Canon Nanotechnologies, Inc., a company formed as a result of the acquisition of the semiconductor business of MII by Canon Corporation in 2014. The display division of MII was acquired in 2015 by Magic Leap, Inc., a leading augmented/mixed reality company.