Oral Technical Sessions
Technical Session 1 – Precision Design
Session Chairs: Aaron E. Ramirez (MIT Lincoln Laboratory) and Todd Noste (Lawrence Livermore National Laboratory)
Wednesday, November 6, 2024
8:00 AM – 9:45 AM
- A Bending-type Actuator Based on Single-Crystal Piezoelectric Plates for Use in an Actuated Wafer Table
S.J. Hermanussen, J.P.M.B. Vermeulen, M.F. Heertjes (Eindhoven University of Technology); M.B.I. Habets (ASML B.V.) - Enhancement of Squeeze-film Damper Performance with Poroelastic Materials
Justin M. Verdirame, Samir A. Nayfeh (Physical Precision LLC) - Kinematic Coupling Sensitivity Analysis
Folkers E. Rojas (Millie Rojas Engineering Corporation) - Program for Design of Accurate 3D Kinematic Couplings with Error Propagation
Tyler Seawright, Michel Pharand (San José State University)
Commercial Presenters: Cranfield Precision, Division of Fives Landis Ltd, Professional Instruments Company, Starrett Tru-Stone Technologies
Technical Session 2 – Controls and Mechatronics 1
Session Chairs: Stephen J. Ludwick (Aerotech, Inc.) and Burak Sencer (Oregon State University)
Wednesday, November 6, 2024
10:15 AM – 12:00 Noon
- Experimental Validation of a Piezoelectric Wafer Stage Concept Combined with Highly Variable Viscoelastic Stiffness
R.G.C. de Bruijn, J.P.M.B. Vermeulen (Eindhoven University of Technology); J.J.M. van de Wijdeven (ASML) - Surrogate-assisted Control Co-design for Over-actuated Lightweight Motion Systems
Jingjie Wu, Lei Zhou (University of Wisconsin-Madison) - Feasibility Study of Maglev Planar Motor with Large Range Rotation
K. Azami, H. B. Koolmees, C.A.M. Verbaan (NTS Group); J.P.M.B. Vermeulen (Eindhoven University of Technology) - Mechanical Assistance for High-acceleration in Precision Motion Systems
Adam Kim, Charles B. Seaberg, David L. Trumper (Massachusetts Institute of Technology)
Commercial Presenters: Attocube, MI-Partners, Wisconsin Electric Machine and Power Electronics Consortium, Moore Nanotechnology Systems, LLC, VDL ETG USA
Technical Session 3 – Metrology Systems & Characterization
Steven R. Gillmer (MIT Lincoln Laboratory) and Felipe Guzman (University of Arizona)
Wednesday, November 6, 2024
1:30 PM – 3:15 PM
- Mobile Mass Metrology: The First-ever Deployment of a Tabletop Kibble Balance from Maryland to Alabama
Leon Chao, Kumar Arumugam, John Draganov, Stephan Schlamminger, Thapelo Mametja, Zane Comden, Lorenz Keck, Frank Seifert, David Newell (National Institute of Standards and Technology) - Beam Steering Interferometry with Mirror Tracking Through Contrast Based Extremum Seeking Control: Proof-of-Concept
K. Looman, L.C. Cacace, J.P.M.B. Vermeulen (Eindhoven University of Technology); R. Hendrix (Prodrive Technologies) - Towards Diffraction-Limited X-ray Optics
Mallory M. Whalen, Alan Garner, Sarah N.T. Heine, Herman L. Marshall, Ralf K. Heilmann, Mark L. Schattenburg (MIT Kavli Institute for Astrophysics and Space Research); Brandon D. Chalifoux (University of Arizona) - To a Newton Meter and Beyond: Tabletop Torque Realization Advancements Under the New SI
Zane Comden, Leon Chao, Kumar Arumugam, Chandra Shahi, Stephan Schlamminger, Frank Seifert, David Newell (National Institute of Standards and Technology)
Commercial Presenters: University of North Carolina-Charlotte, Vermont Photonics Technologies Corp., Zygo Corporation, Lion Precision, Optical Perspectives Group, LLC
Technical Session 4 – Precision Manufacturing
Session Chairs: Ping Guo (Northwestern University) and Christopher J. Morgan (Moore Nanotechnology Systems, LLC)
Thursday, November 7, 2024
8:00 AM – 9:45 AM
- Fabrication of Flexure Geometries in Ceramic Additive Manufacturing
Anand Rathnam, Stuart T. Smith (University of North Carolina – Charlotte) - A Sample Partitioning Approach for Milling Stability Modeling with Chatter Frequency Test Point Selection
Tony L. Schmitz (University of Tennessee, Knoxville) - High-pressure Plasma Etching Technique Up to 900 kPa for Damage-free Ultra-precision Machining
Shotaro Matsumura, Masafumi Miyake, Yasuhisa Sano, (Osaka University); Kenichi Morita (S-Surface Technologies); Kazuto Yamauchi (Osaka University-RIKEN Center for Science and Technology) - Uniform Metal Powders Produced by Cylindrical Turning with Ultrasonic Modulation
Yaoke Wang, Malachi Landis, Clement Ekaputra, Valeria Vita, Ping Guo (Northwestern University) - Performance and Uncertainty Evaluation of Optical Coordinate Metrology for Hybrid Manufacturing
Jake Dvorak, Ross Zameroski, Tony L. Schmitz (University of Tennessee, Knoxville)
Commercial Presenters: America’s Cutting Edge (ACE)/IACMI, OptiPro Systems, Boston Micro Fabrication (BMF)
Technical Session 5 – Controls and Mechatronics 2
Session Chairs: David L. Trumper (Massachusetts Institute of Technology) and Lei Zhou (University of Wisconsin – Madison)
Thursday, November 7, 2024
10:15 AM – 12:00 Noon
- Frame Deformations Control Based on Reduced Order Thermo-elastic Models
Walter Aarden, Theo Ruijl (MI-partners BV) - High Accuracy Fast Tool Servo Utilizing Moving-magnet Voicecoil
Christopher Morgan, Zachary Timothy (Moore Nanotechnology Systems) - Data-Driven Feedforward Control of Active Inertial Dampers for High Performance Vibration Mitigation
Kaan Bahtiyar, Burak Sencer (Oregon State University); Xaiver Beudaert (IDEKO) - Operational Modelling of Rotor-Magnetic Bearing Systems in Rotation
Brett Wallace, Jihyun Lee (University of Calgary); Armand Farhat (SKF S2M Magnetic Mechatronics)
Commercial Presenters: MPS USA, Inc., Aerotech, Inc., NTS Group USA, Precisioneers Group
Technical Session 6 – Micro-Nano Technologies
Session Chairs: Michael A. Cullinan (The University of Texas at Austin) and Robert M. Panas (Bright Silicon Technologies)
Thursday, November 7, 2024
1:30 PM – 3:15 PM
- Precision Engineering Challenges in Electronics Packaging
Texas Institute for Electronics - Towards Manufacturing and Metrology of Roll-to-Roll Holographic Nanostructures
Luis Arturo Aguirre, Barbara Groh, Kwon Sang Lee, Shashank Venkatesan, Michael Baldea, Chih-Hao Chang, Michael Cullinan (University of Texas at Austin); Liam G. Connolly (National Institute of Standards and Technology) - Multi-stimuli, Multi-scale Transduction via Mechanical Logic
Melika Ahmadi, Amin Farzaneh, Jonathan B. Hopkins (University of California-Los Angeles); Widianto P. Moestopo, Abhinav Parakh, Logan Bekker, Elaine Lee, Caitlyn C. Cook, Hilary A. Johnson, , John Cortes, Andrew J. Pascall (Lawrence Livermore National Laboratory); Robert M. Panas (Bright Silicon Technologies) - Balancing Intrinsic Stress Nonlinearities to Realize an Iscochronous Clock Gravimeter
Charles A. Condos, Aman Agrawal, Jack Manley, Dalziel Wilson (University of Arizona); Jon R. Pratt, Stephan Schlamminger (National Institute of Standards and Technology)
Commercial Presenters: euspen, DEWESoft LLC, HEIDENHAIN CORPORATION, Magnescale Americas, Inc.
Technical Session 7 – Precision Design (Flexure Use and Design)
Session Chairs: Tyler A. Seawright (KLA) and Folkers Rojas (Millie Rojas Engineering Corporation)
Friday, November 8, 2024
8:00 AM – 9:45 AM
- T-Flex ELC: A Flexure-based Hexapod with Economical Actuation, Sensing and Kinematics
Jeffrey Uitbeijerse, Marijn Nijenhuis, Dannis M. Brouwer (University of Twente) - Design and Characterization of a High-Accuracy, Stackable, Tip/Tilt Mirror Actuator Driven by a Piezoelectronic Ultrasonic Motor
Aaron E. Ramirez, Christopher Roll, Jeffrey M. Roth (MIT Lincoln Laboratory) - Dynamic Balancing a 1-DOF Positioning Stage to Maximize External Vibration Rejection
Vinayak J. Kalas, Francesco Patti, Herm Nelissen, Rick Baade, Johannes M. Vogels (VDL ETG Technology & Development); Jan J. de Jong (University of Twente) - A Novel Sandwich Design for Improved Out-of-Plane Stiffness in Double Parallelogram Flexure Mechanism
Moeen Radgolchin, Siddharth Rath, Shorya Awtar (University of Michigan)
Technical Session 8 – Combined Session: Metrology Systems & Characterization and Precision Manufacturing (Process Improvement and Validation)
Session Chairs: Tony L. Schmitz (University of Tennessee, Knoxville) and Axel Grabowski (Physik Instrumente (PI) GmbH & Co. KG)
Friday, November 8, 2024
10:15 AM – 12:00 Noon
- Constrained-motion Drilling Dynamometer Design and Evaluation
Ross W. Zameroski, Tony Schmitz (University of Tennessee, Knoxville); Christoph M. Ramsauer, Christoph Habersohn, Friedrich Bleicher (Technical University of Vienna) - On-Machine Metrology for Diamond Turning Applications
Daodang Wang, Wenjun Kang, Yihan Wang, Hongzhang Ma, Rongguang Liang (The University of Arizona) - Modal Testing of KDP Flycutting Machine Vacuum Chucks
Todd Noste, Edwin Northcutt, Ahmed Abdel-Gwad (Lawrence Livermore National Laboratory) - Spindle Speed Selection in Additive Friction Stir Deposition for Desired Temperature
Tony L. Schmitz (University of Tennessee, Knoxville) - Velocity Dependent Process Damping Calibration in Milling
Gregory M. Corson, Christopher Tyler, Tony L. Schmitz (University of Tennessee, Knoxville)