In Person Only

9A-9B Systems Engineering Parts 1 and 2

Antonius T. Peijnenburg and Jos de Klerk, VDL Enabling Technologies Group
Vivek G. Badami, Zygo Corporation

Tuesday, October 11, 2022
8:00AM – 12:00N (PDT USA) – Part 1
1:30PM – 5:30PM (PDT USA) – Part 2

Systems engineering is an interdisciplinary field of engineering and engineering management that focuses on how to design, integrate, and manage complex systems over their life cycles. At its core, systems engineering utilizes systems thinking principles to organize this body of knowledge.” This is what Wikipedia says about SE. While SE is well established and standardized in industries such as aerospace and automotive, in high-tech equipment the application is more diverse. The basic principles are similar, such as doing requirements management, but a domain specific flavor is used. Typically in high-tech equipment the volumes are low, complexity can be extremely high, unreliability affects productivity and not human lives and time to market is critical. This leads to a specific way of “doing SE” and this tutorial will thus focus on precision engineered high-tech equipment.

Part 1 – Ton Peijnenburg and Jos de Klerk

After a general introduction of the tutors and the field of SE, three topics will be discussed, covering the range from “why” via “what” to “how”. Underlying will be the general SE principles, e.g. breaking down a system in modules, and the steps will be illustrated for a high-tech semiconductor equipment tool. In a first block, the starting points of a system development will be explored. Secondly, techniques for system error budgeting are discussed, including how statistics will affect these. Third and lastly, the balancing of system parameters will be explained, and how to maximize value while minimizing parameters such as cost and risk.

Part 2 – Ton Peijnenburg, Jos de Klerk, and Dr. Vivek G. Badami

In the second part of the tutorial, a case will be studied in more detail, focusing on a set of topics that are central to systems engineering. The case will be a precision mechatronic module which will be studied as part of the system it is part of. Topics to be studied as part of the case will include requirements elicitation and analysis; system budgeting; system modeling; system breakdown, interfaces and dependencies; trade-off analysis. This second part is suitable for people with experience in systems engineering, or as extension to part 1.

Ton Peijnenburg is with VDL Enabling Technologies Group where he is Manager Systems Engineering. He studied Electrical Engineering at Eindhoven University of Technology (TU/e, the Netherlands) where he obtained his MSc in 1992. He then started working as a development engineer at Philips’ Center for Industrial Technology (Eindhoven). From 2002 until 2007, he was a mechatronics systems manager at Philips Electronics North America. From 2008 until 2010, he was R&D manager for the Phenom Scanning Electron Microscopes at FEI company (Eindhoven). In 2010 he became manager Advanced Developments at VDL Enabling Technologies (Eindhoven), where he currently is manager Systems Engineering. In 2015, Ton was appointed research fellow at TU/e High Tech Systems Center. 

Jos de Klerk is a senior systems engineer at VDL ETG, Eindhoven, The Netherlands, where he is involved in multiple high tech innovative and complex product developments and is leading an internal systems engineering education program. Jos has 28 years of experience in the semiconductor industry and has worked at ASML for 23 years, of which 15 years as a systems engineer. Jos holds a MSc degree in Physics from Delft University of Technology.

Vivek has been part of the Innovations Group at Zygo Corporation since 2006, where as a Technology Fellow he works on precision engineering challenges across the entire organization. He also actively involved in mentoring young engineers in the art and science of precision engineering. Vivek is active in the precision engineering and metrology communities. He is a past president of the American Society for Precision Engineering (ASPE) and has served the Society in various capacities, including as Associate Editor for the international journal of the Society, Precision Engineering. Vivek has authored several technical papers, a book chapter and holds several patents. Vivek obtained his doctorate from the Center for Precision Metrology at the University of North Carolina at Charlotte in 1999, where he is now an Adjunct Professor in the Department of Mechanical Engineering and Engineering Science.