In Person Only

12-Passive Damping for High Frequency Dynamics in Precision Designs:
Optimizing Machine Performance

Cornelis A.M. Verbaan, NTS Development & Engineering
Johannes P. Vermeulen, Eindhoven University of Technology

Tuesday, October 11, 2022
8:00AM – 12:00N (PDT USA)

The implementation of passive damping is becoming a key knob for getting precision engineering applications to meet tighter specifications over time. For high-tech (motion) systems, high-bandwidth control of systems is usually limited by highly undamped resonances. Passive damping can highly simplify controller design and/or improve positioning performance. This tutorial will address the design, modelling, and implementation of passive damping in high-tech mechanical systems. We will discuss the trade-off between damping on the one hand, and stiffness and position uncertainty on the other. Various passive damping principles will be discussed, material damping (mainly viscous- and linear viscoelastic damping), and artificial damper design such as tuned mass damping, robust mass damping, and constrained- and free-layer damping. We will focus on different application areas, such as machine tools and semiconductor applications.

Kees Verbaan has finished his masters in 2010 (Cum Laude) and subsequently worked on his PhD-thesis. This work included the design of passive dampers, combined with optimization of the control loops to maximize performance of a mechatronic system. This research was carried out for AMSL Research Mechatronics. Afterwards, he started as a system architect at NTS Development & Engineering, mainly working for the semiconductor market, designing production and inspection equipment. Beside this, he is co-lecturer at the High-Tech Institute, presenting a course about passive damping for people from the industry.

Johannes P. Vermeulen (Eindhoven University of Technology)