Session 4: Controls & Mechatronics

Oral Presentations	Authors
Piezoelectric Shunt Damping in Cryogenic Conditions: Application to a Flexure-based Mechanism	Ambaum, N., Eindhoven University of Technology Mokrani, B., ASML Vermeulen, J., Eindhoven University of Technology
Intelligent Online Scan Sequence Optimization for Uniform Temperature Distribution in Laser Powder Bed Fusion	Okwudire, C., University of Michigan Ramani, K., University of Michigan He, C., University of Michigan
Thermal Error Compensation for Large Machine Tools	Ibabe, B. I., IDEKO S.COOP Colinas, N., IDEKO S. COOP López de Lacalle, L. N., EHU-UPV Aguirre, G., IDEKO S.COOP
Magnetically Levitated XYZ-Nanopositioning Sample for X-Ray Microscopy	Heyman, I., The University of Texas at Austin Ibrahim, M., The University of Texas at Austin Zhou, L., The University of Texas at Austin
Frequency-dependency and Coupled Dynamics of Near Field Acoustic Levitation Bearing	Guo, P., Northwestern University Wang, Y., Northwestern University
Contact-free, Electrostatically-levitated Reticle Handoff in Photolithography Tools	Bhushan, B., Massachusetts Institute of Technology David Trumper, Massachusetts Institute of Technology
Active Control of High Frequency Regenerative Chatter Vibrations with Machine Tool Feed Drives	Dumanli, A., Oregon State University Sencer, B., Oregon State University