33rd Annual Meeting

Sunday – Friday, November 4 – November 9, 2018
Red Rock Casino • Resort • Spa
Las Vegas, Nevada, USA

Conference Chair:
Kate M. Medicus, Ruda Cardinal, Inc.

Oral Presentations

Tuesday – Thursday, November 6-8, 2018

Session 1
Characterization
Tuesday, November 6, 2018, 8:30 AM – 10:00 AM
Session Chairs: Brandon M. Lane (National Institute of Standards and Technology) and Nelson Cardenas (Oculus)

• Determination of the Lateral Resolution of an Interference Microscope Using A Micro-scale Sphere
  Su, R.; Thomas, M.; Leach, R. K. (University of Nottingham); de Groot, P. J. (Zygo Corporation); Coupland, J. M. (Loughborough Uinversity)
• Infidelity and the Calibration of Surface Topography Measuring Instruments
  Leach, R. K. (University of Nottingham); de Groot, P. J. (Zygo Corporation); Haitjema, H. (Mitutoyo Research Center Europe B.V.)
• Virtual Optimization of Artifact Based Calibration of Machine Tools
  Aguirre, G.; Iñigo, B.; Cilla, J.; Urreta, H. (IK4-IDEKO)
• Calibration of a High-precision Five Degree of Freedom Hybrid Mechanism
  Karim, S.; Piano, S.; Leach, R. K. (University of Nottingham); Tolley, M. (Science and Technology Facilites Council (STFC))
• Achievable Figure and Finish on Infrared Crystal with the Micro-LAM Process
  Shahinian, H.; Kode, S. K.; Ravindra D.; Zaytsev, D.; Navare, J. A. (Micro-LAM, Inc.)

Session 2
Machining Process Improvements
Tuesday, November 6, 2018, 10:30 AM – 12:00 PM
Session Chairs: Kevin E. Elliott (Corning, Inc.) and Lucas M. Valdez (Los Alamos National Laboratory)

• High Performance Turning Assisted by Chip-pulling
  Sencer, B.; Maulimov, M. (Oregon State University)
• The Effect of Symmetric and Asymmetric Dynamics on Period-N Bifurcations
  Honeycutt, A.; Schmitz, T. L. (University of North Carolina-Charlotte)
• Design Improvement of the Cutting Fluid Supply of a Large 5-axis Machine Tool
  Hernandez-Becerro, P.; Blaser, P.; Wegener, K. (ETH Zürich); Mayr, J. (inspire AG)
• PIRest Technology – New Piezo Technology for Active Alignments and Error Corrections in Difficult-to-access Areas and Systems
  Reiser, J.; Marth, H.; Bach, M. (Physik Instrumente GmbH & Co. KG)

Session 3
Controls and Mechatronics
Wednesday, November 7, 2018, 8:30AM – 10:00AM
Session Chairs: Chinedum E. Okwudire (University of Michigan) and Burak Sencer (Oregon State University)

• A Magnetically Suspended, Spherical Permanent Magnetic Dipole Actuator
  Hamer, T.; Noh, M.; Zhou, L.; Chabot, J.; Trumper, D. L. (Massachusetts Institute of Technology)
• Magnetically Levitated Linear Stage Driven by Hysteresis Motors
  Zhou, L.; Trumper, D. L. (Massachusetts Institute of Technology)
• A Novel Semi-active Joint for Simultaneously Achieving Fast Settling and Excellent In-position Stability in Point-to-point Positioning
  Dong, X.; Okwudire, C. E. (University of Michigan)
• A Tabletop Active Vibration Isolation System for Ultra-high Vacuum Optical Experiments
  Fernandez G., A. (Massachusetts Institute of Tecnology (LIGO)); Matichard, F. (LIGO Caltech/MIT)
• Design and Modeling Approach for a Lifting and Actuating Unit for the Application in Nano-Precision Machines
  Gorges, S.; Hesse, S. (IMMS Institut für Mikroelektronik und Mechatronik Systeme)

Session 4
Micro-Nano Technologies
Wednesday, November 7, 2018, 10:30 AM – 12:00 PM
Session Chairs: Michael A. Cullinan (The University of Texas at Austin) and Shih-Chi Chen (The Chinese University of Hong Kong)

• Overview from Winter Topical Meeting
  Cullinan, M. A. (The University of Texas at Austin)
• Sub-system Level Overview of Micro-scale Selective Laser Sintering Tool
  Roy, N. K.; Behera, D.; Cullinan, M. A. (The University of Texas at Austin)
• A Roll-to-roll System for In-line, Tip Based Nanometrology of Patterned Materials and Devices
  Connolly, L. G.; Garcia, J.; Cullinan, M. A. (The University of Texas at Austin)
• Sensorless Wavefront Correction for DMD-Based Fast 3D Imaging and Nanofabrication
  Ren, M.; Geng, Q.; Chen, S.-C. (The Chinese University of Hong Kong)
• Recent Advances in Ultrasonic Nanocoining to Create Large Arrays of Sub-Wavelength Features
  Furst, S. J.; Miller, N.; McDonald, T. (Smart Material Solutions, Inc.)
• Wafer Scale Exfoliation of Monocrystalline Micro-scale Silicon Films
  Ward, M. J.; Cullinan, M. A. (The University of Texas at Austin)

Session 5
Metrology – Machine Characterization
Wednesday, November 7, 2018, 1:30 PM – 2:10 PM
Session Chair: Robert D. Grejda (Corning Tropel Corporation) and Richard K. Leach (University of Nottingham)

• Limits of Displacement Measure Interferometry on Rough Surfaces Using A Microchip Laser Source
  Arumugam, K.; Smith, S.; Her, T.-H. (University of North Carolina-Charlotte)
• Ultra Precise Motion Error Measurement of Rotation Kinematics for the Integration in Nanomeasuring and Nanofabrication Machines
  Fern, F.; Füßl, R.; Schienbein, R.; Theska, R. (Ilmenau University of Technology)

Student Challenge Session
Wednesday, November 7, 2018, 2:10PM – 3:00PM
Session Chair: Kate M. Medicus (Optimax Systems, Inc.)

• Introduction to the ASPE Student Challenge
  Aguirre, L. A. (3M Company); Smith, S. (University of North Carolina-Charlotte)
• Presentation of the Student Challenge Winners
  Aguirre, L. A. (3M Company); Smith, S. (University of North Carolina-Charlotte)
• Student Presentations

Session 6
Metrology
Thursday, November 8, 2018, 8:30 AM – 10:00 AM
Session Chair: Jimmie A. Miller (University of North Carolina-Charlotte) and Jon D. Ellis (University of Arizona)

• Representing the Specification of Industrial X-ray Computed Tomography with Amplitude-Wavelength Space
  Villarraga-Gómez, H. (Nikon Metrology, Inc.); Leach, R. K. (University of Nottingham); Smith, S. T. (University of North Carolina – Charlotte)
• Real-time in Situ Metrology of the Shape of an X-ray Adaptive Mirror Using an Array of Interferometric Absolute Position Sensors
  Badami, V. G.; Abruna, E. (Zygo Corporation); Huang, L.; Idir, M. (Brookhaven National Laboratory)
• High Accuracy Cylindrical Mirror Measurement by Three-dimensional Nano-profiler Based on the Normal Vector Tracing Method
  Kang, J.; Shiraji, H.; Kizaki, R.; Toyoshi, Y.; Kitayama, T.; Yamamura K.; Endo, K. (Osaka University); Miyawaki, T.; (Nikon Corporation)
• A Curved Surface-Insensitive Optical Sensing Technique for Precision Spindle Health Monitoring
  Lee, C-B. (Tennessee Technological University); Kim, G. (Tri-N Co., Ltd.)

Session 7
Precision Design of Instruments
Thursday, November 8, 2018, 10:30 AM – 12:00 PM
Session Chair: Richard M. Seugling (Lawrence Livermore National Laboratory) and Mark T. Kosmowski (Electro Scientific Industries, Inc.)

• Error Budgeting, Manufacturing and Measurement Considerations for the Development of a High Precision Motion Platform
  Adriaansen, S.; Brackley, D.; Doig, A. J.; Sheehan, B. (Corning, Inc.)
• Berkeley Met5: Engineering Precision and Stability for the Highest Resolution EUV Lithography Tool
  Allezy, A. P. (Lawrence Berkeley National Laboratory)
• Designing Low Frequency Band Gaps in Additively Manufactured Parts Using Internal Resonators
  Elmadih, W.; Syam, W. P.; Maskery, I.; Leach, R. K. (University of Nottingham)
• Design of an Instrument for Characterizing the Embedded Brain Tissue Cutting Process
  Ramirez, A. E.; Culpepper, M. L. (Massachusetts Institute of Technology)
• PZT-Actuated Compliant Locking Device
  Tschiersky, M.; Brouwer, D. M.; Stramigioli, S. (University of Twente); Berselli, G. (University of Genova); Herder, J. L. (Delft University of Technology)

Session 8
Precision Machining
Thursday, November 8, 2018, 1:30 PM – 3:00 PM
Session Chair: Deepak Ravindra Ph.D. (Micro-LAM, Inc.) and Ronnie R Fesperman, Jr. (Precision Mindset LLC)

• State-of-the-art in Applying Ultrasonic Assisted Diamond Turning to Different Materials
  Bulla, B.; Robertson, D.; Dicke, C. (son-x GmbH)
• High Speed Cutting of Monocrystalline Silicon by Off-axis Diamond Turning
  Berger, D.; Schönemann, L.; Riemer, O.; Brinksmeier, E. (University of Bremen)
• Suitability of RSA Aluminum for Monolithic DOE in the VIS Range
  Jagodzinski, M.; Kühne, S.; Malcher, M. (Technische Universität Berlin); Oberschmidt, D. (Fraunhofer Institute for Production Systems and Design Technology (IPK))
• Focused Ion Beam Milling of Microscale Features
  Wong, A. R.; Dow, T. A.; Pankow, M. (North Carolina State University)
• Bessel Beam Array for High Resolution Wafer Dicing
  Lee, H. H.; Zhao, E.; Zhang, D.; Chang, Y.; Chen, S.-C. (The Chinese University of Hong Kong)