32nd Annual Meeting

 

October 29 – November 3, 2017
The Westin Charlotte
Charlotte, North Carolina, USA

Conference Chair:
Vivek G. Badami, Zygo Corporation



Poster Presentations

 


Poster Session 1
Tuesday, October 31, 2017, 4:30 PM – 6:00 PM
Session Chairs: Brian P. O’Connor (Aerotech, Inc.) and Michael L. Barkman (Zygo Corporation)

Characterization, Data Reduction and Applications of Measurement Science

  1. Statistical Analysis of Surface Measurements and Images
    Azimi, F.; Young, B.; Mullany, B. A. (University of North Carolina-Charlotte)
  2. Methods to Determine the Center of Contrast Targets from Terrestrial Laser Scanner Data
    Rachakonda, P. K.; Muralikrishnan, B.; Sawyer, D. S. (National Institute of Standards & Technology); Wang, L. (China Jiliang University)
  3. Compensation of Measured Frequency Response Functions Using Accelerometer Models and Inverse RCSA
    Satyanarayana, H.; Schmitz, T. L. (University of North Carolina-Charlotte)
  4. Task-Specific Measurement Uncertainty of a Hemispherical Artifact
    Valdez, L. M.; Valdez, M. O.;Montaño, J. D. (Los Alamos National Laboratory)

Metrology Systems and Techniques

  1. Simultaneous Multi-part Metrology and Measurement Repeatability Utilizing Computed Tomography
    Bauza, M. B.; Tenboer, J.; Lisovich, A.; Zhou, J.; Li, M.; Zhang, H. (Carl Zeiss Industrial Metrology)
  2. Simultaneous Measurement of Backlash and Geometric Errors of Linear Axes with a Laser Tracer
    Cong, H.; Zhang, C.; Wang, T.; Han, L.; Chen, Y. (Xi’an Jiaotong University)
  3. Multi-Scale Contextual Characterization via High Throughput Multi-beam Electron Microscopy
    Crosby, K.; Garbowski, T.; Eberle, A. L. (Carl Zeiss Microscopy); Bauza, M. B. (Carl Zeiss Industrial Metrology)
  4. Error Budgeting Analysis for X-ray Systems Using a 0D Uncertainty Model
    Cuadra, J. A.; Panas R. M. (Lawrence Livermore National Laboratory)
  5. An Optical Method for In-situ Measurement of Form and Surface Profile of Axisymmetric Objects
    Farahi, N.; Babaie, J.; Ziegert, J. C.; Farahi, F. (University of North Carolina-Charlotte); Abolbashari, M. (Optoniks, Inc.)
  6. Attrition/Abrasive Wear Monitoring of Cutting Tools Based on Knife-Edge Interferometry
    Lee, C-B.; Zhao, R.; Jeon, S.; Stepanick, C. K.; Zolfaghari, A. (Tennessee Technological University)
  7. Challenges in Measuring Spherical Geometry Using Terrestrial Laser Scanners
    Muralikrishnan, B.; Rachakonda, P. K.; Shilling, K. M.; Sawyer, D. S.; Cheok, G. (National Institute of Standards & Technology)
  8. Replication Assessment of Surface Texture at Sub-micrometre Scale
    Quagliotti, D.; Tosello, G.; Hansen, H. N. (Technical University of Denmark)
  9. Preliminary Results for Alignment of Critical-Angle Transmission (CAT) Gratings
    Song, J.; Heilmann, R. K.; Schattenburg, M. L. (Massachusetts Institute of Technology)
  10. Fabrication of Probe Tips for Nanoscale 3D Metrology
    Uchiyama, K.; Murakami, H. (The University of Kitakyushu); Katsuki, A.; Sajima, T. (Kyushu University); Yamamoto, T.; Nagata, R. (Inatsuki Science Co., Ltd); Fujiyoshi, K. (Fukuoka Industrial Technology Center)
  11. Statistical Reduction Technique for Zero Position Error Between Sensors in Improved Sequential Three-Point Method
    Uda, Y.; Natsume, Y.; Tamagawa, T.; Shimada, S. (Osaka Electro-Communication University); Imura, R. (Nagase Integrex Co., Ltd.)
  12. Uncertainty Analysis for Part Density Determination via Hydrostatic Weighing
    Valdez, M. O.; Montaño, J. D.; Valdez, L. M. (Los Alamos National Laboratory)
  13. Antivibration Systems with Elastic-Dissipative Dampers
    Vislobokov, A. A. (Laboratory of Precision Mechanics and Optics)
  14. The Next Generation Heterodyne Interferometric Grating Encoder System for Multi- Displacement Measurement of Wafer Stage
    Wang, L.; Zhang, M.; Zhu, Y.; Ding, S.; Ye, S.; (Tsinghua University); Jia, Z.; (Beijing U-precision Tech Co., Ltd); Xia, Y. (University of Electronic Science and Technology)
  15. Geometric Error Measurement and Compensation of a Rotary Table Using a Circular Ball Plate Artifact
    Wang, Q.; Goch, F. G. (University of North Carolina-Charlotte)
  16. Reference Metrology System to Measure and Compensate Floor Deformations
    Woo, S.; Park, S-H. (Samsung Electronics Co., Ltd.)
  17. Large Area Inspection Using a Multi-point, Tip-Based Nanometrology System
    Yao, T-F.; Cullinan, M. A. (The University of Texas at Austin)
  18. Development an Innovative Sensor for Measuring Two-degree of Freedom Motions of Single Axis Linear Nanopositioning Stage
    Zolfaghari, A.; Jeon, S.; Stepanick, C. K.; Lee, C-B. (Tennessee Technological University)

Precision Design of Instruments and Machines

  1. Design of a Tip Based, In-Line Metrology System for Roll-to-Roll Manufactured Flexible Electronic Devices
    Connolly, L. G.; Cullinan, M. A. (The University of Texas at Austin)
  2. Design of a Precision, Adaptive, High-Strain Composite Hinge
    Echter, M. A.; Silver, M. J. (MIT Lincoln Laboratory); Peterson, M. E. (Air Force Research Laboratory)
  3. An Instrument to Measure Temporal Stability of Spring Compression Force
    Jaycox, A. W. (Lawrence Livermore National Laboratory); Lawton, K. M.; Patterson, S. R. (University of North Carolina-Charlotte)
  4. Error Analysis for a High Precision Five Degree of Freedom Hybrid Mechanism for High-Power High-Repetition Rate Laser Operations
    Karim, S.; Piano, A.; Leach, R. K. (University of Nottingham); Tolley, M. (Science and Technology Facilities Council (STFC))
  5. Long-term Creep Measurements of 302 Stainless Steel and Elgiloy
    Lawton, K. M.; Patterson, S. R. (University of North Carolina-Charlotte)
  6. Development of Novel Two-DOF Nano-Positioning Stage with High Thermal Stiffness
    Lee, J-C.; Lee, H-H; Yang, S-H (Kyungpook National University)
  7. A Flexure-Based Multi-Layer Roll-to-Roll Printing Systems
    Li, C.; Chen, S-C. (The Chinese University of Hong Kong)
  8. Large Stroke High Support Stiffness Two Degree of Freedom Flexure Joint
    Naves, M.; Brouwer, D. M.; Aarts, R. G. K. M. (University of Twente)
  9. Precision Mechanical Design and Test of Miniature Dynamic Mirror Benders with Laminar Flexure Bending Mechanism for X-ray Microfocusing
    Shu, D.; Kearney, S.; Anton, J.; (Argonne National Laboratory); Li, A.; Mao, C.; Yan, S.; Liang, D.; Pan, Y. (Shanghai Institute of Applied Physics)
  10. Design, Development and Testing of Large-caliber Precision CNC Double-sided Polishing Machine
    Sun, X.; Zhang, Z.; Zha, J.; Chen, Y. (Xi’an Jiaotong University); Zhang, J. (Jiangsu Yichuang Institute of Intelligent Equipment Co.Ltd.)
  11. Design of a High-Speed Oscillating Blade Microtome
    Wang, J.; Li, C.; Chen, S-C. (The Chinese University of Hong Kong)
  12. Design Strategy for Cryogenic Optical Housing Using Stewart Truss with Dissimilar Materials
    Yoxall, B. E.; Montesanti, R. C.; Bixler, J. V.; Hunt, W. E.; Kuzmenko, P. J.; Priest, R. E. (Lawrence Livermore National Laboratory)
  13. Gantry-Type Machine Tool Accuracy Enhancement Through Geometric Error Real-Time Compensation Based on Open-Architecture PA CNC
    Zhang, C.; Chen, Y. (Xi’an Jiaotong University)
  14. Analysis of Error Motions of Hydrostatic Rotary Table
    Zhang, P.; Chen, Y. (Xi’an Jiaotong University)


Poster Session 2
Wednesday, November 1, 2017, 3:30 PM – 5:00 PM
Session Chairs: Brian P. O’Connor (Aerotech, Inc.) and Michael L. Barkman (Zygo Corporation)

Controls and Mechatronics

  1. Vacuum Compatible Contactless Active Magnetic Linear Bearings for High Cleanliness Robotic Applications
    Baade, R.; Steinbuch, M.; (Eindhoven University of Technology); Peijnenburg, A. T. (VDL Enabling Technologies Group)
  2. A High Performance Feedforward Tuning Approach for Ultra-precision Motion Control
    Dai, L-Y.; Li, X.; Zhu, Y.; Zhang, M. (Tsinghua University)
  3. Basic Characteristics of Novel Hybrid Actuator Integrating a Thermal Bias Element and an Electromagnetic Driving Element
    Hama, T.; Sato, K. (Toyohashi University of Technology)
  4. Identification of Friction Energy Dissipation Using Free Vibration Velocity: Measurement and Modeling
    Kossack, C.; Ziegert, J. C.; Schmitz, T. L. (University of North Carolina-Charlotte)
  5. The Velociprobe: Pushing the Limits with Fast, Robust Control
    Mashrafi, S. T.; Salapaka, S. (University of Illinois at Urbana-Champaign); Preissner, C. (Argonne National Laboratory)
  6. Development of Dynamic Model to Estimate the Frequency Response of Four-Axis Machine Tools
    Song, C-K.; Lee, C-H. (Korea Institute of Machinery & Materials (KIMM)); Dinh, P. V. (Korea University of Science and Technology)
  7. Generation of Practical Dynamic Free-Form Contours
    Wilson, C. S. (Omron Delta Tau)

Micro and Nano Technologies

  1. Fabrication of Polycrystalline Diamond Molds by Micro EDM
    Kasai, S.; Yan, J. (Keio University); Sodetai, T. (Seiko Instruments, Inc.)
  2. Design of High Resolution and High Force MEMS Tensile Testers for Direct Metrology of Additively Manufactured Submicron Features
    Ladner, I. S.; Saha, S. K.; Cullinan, M. A. (The University of Texas at Austin); Cao, A. (Lawrence Livermore National Laboratory)
  3. Wafer Scale Exfoliation of Micro-Scale Silicon Films
    Ward, M.; Yang, M.; Cullinan, M. A. (The University of Texas at Austin)
  4. Development of Micro Ball Forming to Process Micro Structure on Curved Surface
    Yamaguchi, K.; Kakutani, S.; Ota, M.; Egashira, K. (Kyoto Institute of Technology); Nakano, T. (Mitsubishi Nichiyu Forklift Co., Ltd.)
  5. Design and Modeling of a Bidirectional MEMS Thermal Actuator
    Zhao, C.; Ladner, I. S.; Song, A.; Hopkins J. B.; Cullinan, M. A. (The University of Texas at Austin)

Precision Manufacturing Machines and Technologies

  1. Mechanical Machining Processes for Laser Target Manufacturing
    Andre, J.; Schunck, J.; Pinay, A.; Gregoire, A.; Chicanne, C.; Theobald, M. (CEA)
  2. Investigation in μ-EDM Techniques for Laser Target Application
    Barnay, N.; Andre, J. (CEA)
  3. Stability in Modulated Tool Path Turning
    Copenhaver, R.Ziegert, J. C.; Schmitz, T. L. (University of North Carolina-Charlotte)
  4. Dynamics of Surface Finish and Built-up-edge in Diamond Machining
    Dow, T. A.; Garrard, K. P. (North Carolina State University); Suit, B. M. (Lockheed Martin)
  5. Fundamental Experiments of Additive Manufacturing Method by Selective Solidification Using Electrical Discharge
    Furutani, K.; Tsuchiya, T.; Yamagishi, H. (Toyota Technological Institute)
  6. Precision Manufacturing of Internal Involute Gears Using 5-Axis Milling Center
    Groover, J. (University of North Carolina-Charlotte)
  7. Force Measurement in Diamond Microchiseling
    Gurganus, D. K.; Owen, J. D.; Sizemore, N. E.; Davies, M. A. (University of North Carolina-Charlotte)
  8. An Examination of Surface Location Error and Surface Roughness for Period-2 Instability in Milling
    Honeycutt, A.; Schmitz, T. L. (University of North Carolina-Charlotte)
  9. Effect of the Additive Manufacturing Process on Cutting Forces in Hybrid Manufacturing
    Honeycutt, A.; Schmitz, T. L. (University of North Carolina-Charlotte); Heigel, J. (National Institute of Standards & Technology);
  10. The Challenges and Consequences of Material Uncertainties in Metal Laser Powder Bed Fusion
    Jared, B. H.; Boyce, B.; Madison, J.; Ostien, J.; Rodelas, J.; Salzbrenner, B.; Swiler, L.; Underwood, O.; Saiz, D. (Sandia National Laboratories)
  11. Analysis on Hydrophobicity of Micro Channel and Pillar Patterns of Polymer for Orthodontic Appliance Machined by Cutting Process
    Je, T-J.; Jeong, J-Y.; Choi, D-S.;Jeon, E-C. (Korea Institute of Machinery & Materials (KIMM))
  12. Measurement of Dynamic Characteristics of Hydrostatic Spindle Against Radially Applied External Forces
    Kirigaya, R.; Hayashi, A.; Nakao, Y. (Kanagawa University); Fedorynenko, D. (Chernihiv National University of Technology)
  13. Effect Of Cutting Fluid Composition On Laser Assisted Machining Of Optical Silicon
    Mohammadi, H. (Western Michigan University); Ravindra D. (Micro-LAM Technologies, LLC)
  14. Laser Augmented Drilling Operation Using A Rotating Tool Design
    Mohammadi, H.; Patten, J. A. (Western Michigan University)
  15. Precision Polishing Technology of Ferroelectric PMN-PT Single Crystals for Smoother Surfaces
    Namba, Y. Y.; Suzuki, H. Y.; Takahashi, H. (Chubu University)
  16. Dry Planarization Method Using a Transpport of Active Species
    Ryokume, R.; Miyazaki, T.; Sano, Y.; Matsuyama, S.; Yamauchi, K. (Osaka University)
  17. Milling of High-Alloyed Steel Molds for Precision Injection Molding of Microfluidical Parts
    Schmuetz, J. (Beuth University of Applied Sciences)
  18. Fiber Based Tools for Precision Polishing Applications
    Shahinian, H.;Hassan, N.; Cherukuri, H. P.; Mullany, B. A. (University of North Carolina-Charlotte)
  19. On Gyroscope Mechanism for Mobile Machining Machine
    Shim, J.; Heo, S.; Hwang, J.; Ro, S-K. (Korea Institute of Machinery & Materials (KIMM))
  20. Critical Chip Thickness in Ultra-Precision Flycutting of Germanium
    Sizemore, N. E.; Owen, J. D.; Davies, M. A. (University of North Carolina-Charlotte); Meyer, D. (Foundation Institute of Materials Science)
  21. How to Realize the Self-Protective Tool During Cutting of Difficult-Cut Material?
    Song, X.; Takahashi, Y.; Ihara, T. (Chuo University)
  22. Temperature Measurement of Burnishing Process by Electro-Conductive Tool
    Tanaka, H.; Tanaka, H.; Sakamoto, H. (Sophia University)
  23. Inverted Diamond Cutting of Right Triangular Retroreflectors: Surface Quality and Cutting Forces
    Tauhiduzzaman, M.; Bordatchev, E. V. (National Research Council of Canada); Milliken, N.; Tutunea- Fatan, R. R. (Western University)
  24. Fundamental Study on Thermal Stability of Micro Milling Spindle Supported by Water Hydrostatic Bearings Under Spindle Rotation
    Yaguchi, T.; Hayashi, A.; Nakao, Y. (Kanagawa University)
  25. Improving Surface Quality of Thin-Walled Double Side Aspheric Component by Machining Process and Measurement Optimization
    Zha, J.; Chu, J.; Chen, Y.; Li, Y. (Xi’an Jiaotong University)
 

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