32nd Annual Meeting


October 29 – November 3, 2017
The Westin Charlotte
Charlotte, North Carolina, USA

Conference Chair:
Vivek G. Badami, Zygo Corporation

Poster Presentations

Tuesday, October 31, 2017, 4:30 PM – 6:00 PM
Wednesday, November 1, 2017, 3:30 PM – 5:00 PM

Grand Ballroom CD

Session Chairs: Brian P. O’Connor (Aerotech, Inc.) and Michael L. Barkman (Zygo Corporation)


Poster Session 1
Tuesday, October 31, 2017, 4:30 PM – 6:00 PM

Additive Manufacturing

  1. Current Use and Potential of Additive Manufacturing for Optical Applications
    Brunelle, M.; Ferralli, I.; Whitsitt, R.; Medicus, Kate M. (Optimax Systems, Inc.)

Characterization, Data Reduction and Applications of Measurement Science

  1. Statistical Analysis of Surface Measurements and Images
    Azimi, F.; Young, B.; Mullany, B. A. (University of North Carolina-Charlotte)
  2. Metrology Techniques for Evaluating and Aligning DESI Focal Plate Structure
    Duan, Y.; Ahlen, S. P. (Boston University); Buice, E. S.; Claybaugh, T. M. (Lawrence Berkeley National Laboratory)
  3. Experimental Fused Illumination Mechanism Design with Discriminant Function for Steel Plate
    Kim, G-B; -Bum; Doek, C-E (Korea National University of Transportation)
  4. Any-Degree-of-Freedom Registration of Three-Dimensional Surfaces with Unbalanced Deviations
    Liu, S.; Cheung C-F; Wang, C. J. (The Hong Kong Polytechnic University)
  5. Methods to Determine the Center of Contrast Targets from Terrestrial Laser Scanner Data
    Rachakonda, P. K.; Muralikrishnan, B.; Sawyer, D. S. (National Institute of Standards & Technology); Wang, L. (China Jiliang University)
  6. Compensation of Measured Frequency Response Functions Using Accelerometer Models and Inverse RCSA
    Satyanarayana, H.; Schmitz, T. L. (University of North Carolina-Charlotte)
  7. Task-Specific Measurement Uncertainty of a Hemispherical Artifact
    Valdez, L. M.; Valdez, M. O.;Montaño, J. D. (Los Alamos National Laboratory)
  8. Characterizing Spatial Resolution of a Fringe Projection System for Measuring Additively Manufactured Surfaces
    Zhang, B.; Davies, A. D.; Ziegert, J. C.; Evans, C. J. (University of North Carolina-Charlotte)

Historical and/or Education Perspective on Precision Engineering

  1. Managing Risks when Single-Point Diamond Machining a 24-Day-Cut Germanium Blazed Diffraction Grating
    Montesanti, R. C.; Kuzmenko, P. J.; Little, S.; Bixler, J. V.; Jackson, J. L.; Mirkarimi, P.;  Priest, R. E.; Thelin, P. A.; Watkins, J. A.; Yoxall, B. E. (Lawrence Livermore National Laboratory)

Metrology Systems and Techniques

  1. Stress Induced Frequency Modulation of a Microchip Green Laser
    Arumugam, K.; Smith, S. T.; Her, T.-H. (University of North Carolina-Charlotte)
  2. Simultaneous Measurement of Backlash and Geometric Errors of Linear Axes with a Laser Tracer
    Cong, H.; Chen, Y.; Zhang, C.; Han, L.;  (Xi’an Jiaotong University)
  3. Multi-Scale Contextual Characterization via High Throughput Multi-beam Electron Microscopy
    Crosby, K. (Carl Zeiss Microscopy, LLC); Bauza, M. B. (Carl Zeiss Industrial Metrology); Garbowski, T.; Eberle, A. L. (Carl Zeiss Microscopy GMBH)
  4. Error Budgeting Analysis for X-ray Systems Using a 0D Uncertainty Model
    Cuadra, J. A.; Divin, C. J.; Panas R. M. (Lawrence Livermore National Laboratory)
  5. An Optical Method for In-situ Measurement of Form and Surface Profile of Axisymmetric Objects
    Farahi, N.; Babaie, J.; Ziegert, J. C.; Farahi, F. (University of North Carolina-Charlotte); Abolbashari, M. (Optoniks, Inc.)
  6. Attrition/Abrasive Wear Monitoring of Cutting Tools Based on Knife-Edge Interferometry
    Lee, C-B.; Zhao, R.; Jeon, S.; Zolfaghari, A. (Tennessee Technological University)
  7. Challenges in Measuring Spherical Geometry Using Terrestrial Laser Scanners
    Muralikrishnan, B.; Rachakonda, P. K.; Shilling, K. M.; Lee, V.; Sawyer, D. S.; Cheok, G. (National Institute of Standards & Technology); Cournoyer, L. (National Research Council of Canada)
  8. Optical Sensor for Use in the R-test
    Parks, R. E. (Optical Perspectives Group, LLC); Ziegert, J. C.; Groover, J. (University of North Carolina-Charlotte)
  9. Surface Area Measurement Using Curved Screen Deflectometry for Increased Dynamic Range and Sensitivity
    Pouyafard, A.; Davies, A. D. (University of North Carolina – Charlotte)
  10. Replication Assessment of Surface Texture at Sub-micrometre Scale
    Quagliotti, D.; Tosello, G.; Hansen, H. N. (Technical University of Denmark)
  11. Alignment and Period Measurement of Critical-Angle Transmission Gratings Using a Scanning Laser Reflection Tool
    Song, J.; Heilmann, R.  K.; Schattenburg, M. L. (Massachusetts Institute of Technology); Bruccoleri, A. R. (Izentis, LLC); Hertz, E. (Harvard-Smithsonian Center for Astrophysics)
  12. Fabrication of Probe Tips for Nanoscale 3D Metrology
    Uchiyama, K.; Murakami, H. (The University of Kitakyushu); Katsuki, A.; Sajima, T. (Kyushu University); Yamamoto, T.; Nagata, R. (Inatsuki Science Co., Ltd); Fujiyoshi, K. (Fukuoka Industrial Technology Center)
  13. Minimizing Task-Specific Uncertainty in CMM-Based Freeform Optics Metrology
    Uwakwe, M.; Evans, C. J. (University of North Carolina-Charlotte)
  14. Statistical Reduction Technique for Zero Position Error Between Sensors in Improved Sequential Three-Point Method
    Uda, Y.; Natsume, Y.; Tamagawa, T.; Shimada, S. (Osaka Electro-Communication University); Imura, R. (Nagase Integrex Co., Ltd.)
  15. Uncertainty Analysis for Part Density Determination via Hydrostatic Weighing
    Valdez, M. O.; Montaño, J. D.; Valdez, L. M. (Los Alamos National Laboratory)
  16. The Next Generation Heterodyne Interferometric Grating Encoder System for Multi- Displacement Measurement of a Wafer Stage
    Wang, L. J.; Zhang, M.; Zhu, Y.; Ye, W. N..; (Tsinghua University); Ding, S. Q.; Jia, Z.; (Beijing U-precision Tech Co., Ltd);  Xia, Y. (University of Electronic Science and Technology)
  17. Geometric Error Measurement and Compensation of a Rotary Table Using a Circular Ball Plate Artifact
    Wang, Q.; Goch, F. G. (University of North Carolina-Charlotte)
  18. Reference Metrology System for Compensation of Level Control in Precision State System
    Woo, S.; Park, S-H. (Samsung Electronics Co., Ltd.)
  19. Large Area Inspection Using a Multi-point, Tip-Based Nanometrology System
    Yao, T-F.; Cullinan, M. A. (The University of Texas at Austin)
  20. Development of an Innovative Sensor for Measuring Two-degree-of-Freedom Motions of Single-Axis Linear Nanopositioning Stage
    Zolfaghari, A.; Jeon, S.; Lee, C-B. (Tennessee Technological University); Kim, G. (TRI-N Co. Ltd.)

Precision Design of Instruments and Machines

  1. Axial and Radial Static Stiffness Testing for Ultra-Precision Air Bearing Spindle
    Arneson, S.; Arneson, D. A.; Knapp, B. R.; Oss, D. D. (Professional Instruments Company)
  2. In-Line, Tip Based Nanometrology for Roll-to-Roll Manufactured Materials and Electronic Devices
    Connolly, L. G.; Cullinan, M. A. (The University of Texas at Austin)
  3. Design of a Precision, Active, High-Strain Composite (HSC) Hinge
    Echter, M. A.; Silver, M. J. (MIT Lincoln Laboratory); Peterson, M. E. (Air Force Research Laboratory)
  4. An Instrument to Measure Temporal Stability of Spring Compression Force
    Jaycox, A. W. (Lawrence Livermore National Laboratory); Lawton, K. M.; Patterson, S. R. (University of North Carolina-Charlotte)
  5. Error Analysis for a High-Precision Five Degree of Freedom Hybrid Mechanism for High-Power High-Repetition Rate Laser Operations
    Karim, S.; Piano, A.; Leach, R. K. (University of Nottingham); Tolley, M. (Science and Technology Facilities Council (STFC))
  6. Design and Testing of an Air Bearing Spindle at Low Speed for Nanometer-Level Asynchronous Error
    Knapp, B. R.; Arneson, D. A.; Oss, D. D. (Professional Instruments Company)
  7. Long-term Creep Measurements of 302 Stainless Steel and Elgiloy
    Lawton, K. M.; Patterson, S. R. (University of North Carolina-Charlotte)
  8. Development of Novel Two-DOF Nano-Positioning Stage with High Thermal Stiffness
    Lee, J-C.; Lee, H-H; Yang, S-H (Kyungpook National University)
  9. A Flexure-Based Multi-Layer Roll-to-Roll Printing Systems
    Li, C.; Chen, S-C. (The Chinese University of Hong Kong)
  10. Large Stroke High Support Stiffness Flexure Based Universal Joint
    Naves, M.; Aarts, R. G. K. M.; Brouwer, D. M. (University of Twente)
  11. Precision Mechanical Design and Test of Miniature Dynamic Mirror Benders with Laminar Flexure Bending Mechanism for X-ray Microfocusing
    Shu, D.; Kearney, S.; Anton, J.; (Argonne National Laboratory); Li, A.; Mao, C.; Yan, S.; Liang, D.; Pan, Y. (Shanghai Institute of Applied Physics)
  12. Design, Development and Testing of Large-caliber Precision CNC Double-sided Polishing Machine
    Sun, X.; Zhang, Z.; Zha, J.; Chen, Y. (Xi’an Jiaotong University); Chen, J. (Jiangsu Yichuang Institute of Intelligent Equipment Co.Ltd.)
  13. Design of a High-Speed Oscillating Blade Microtome
    Wang, J.; Li, C.; Chen, S-C. (The Chinese University of Hong Kong)
  14. Design Strategy for Cryogenic Optical Housing Using Stewart Truss with Dissimilar Materials
    Yoxall, B. E.; Montesanti, R. C.; Bixler, J. V.; Hunt, W. E.; Kuzmenko, P. J.; Priest, R. E. (Lawrence Livermore National Laboratory)
  15. Gantry-Type Machine Tool Accuracy Enhancement Through Geometric Error Real-Time Compensation Based on Open-Architecture PA CNC
    Zhang, C.; Cong, H.; Chen, Y. (Xi’an Jiaotong University)
  16. Analysis of Error Motions of Hydrostatic Rotary Table
    Zhang, P.; Chen, Y.; Cong, H. (Xi’an Jiaotong University)

Poster Session 2
Wednesday, November 1, 2017, 3:30 PM – 5:00 PM

Controls and Mechatronics

  1. Vacuum Compatible Contactless Active Magnetic Linear Bearings for High Cleanliness Robotic Applications
    Baade, R.; Steinbuch, M.; (Eindhoven University of Technology); Peijnenburg, A. T. (VDL Enabling Technologies Group)
  2. A High Performance Feedforward Tuning Approach for Ultra-precision Motion Control
    Dai, L-Y.; Li, X.; Zhu, Y.; Zhang, M. (Tsinghua University)
  3. Multi-Axis Trajectory Generation with Optimal Frequency Spectrum for Vibration Avoidance
    Dumanli, A. A.; Sencer, B. (Oregon State University)
  4. A Linear Positioning Stage Using a Thermal Actuator
    Fan, C.; Smith, S. T.; Tarbutton, J. (University of North Carolina – Charlotte)
  5. Basic Characteristics of Novel Hybrid Actuator Integrating a Thermal Bias Element and an Electromagnetic Driving Element
    Hama, T.; Sato, K. (Toyohashi University of Technology)
  6. Identification of Friction Energy Dissipation Using Free Vibration Velocity: Measurement and Modeling
    Kossack, C.; Schmitz, T. L.; Ziegert, J. C. (University of North Carolina-Charlotte)
  7. The Velociprobe: Pushing the Limits with Fast and Robust Control
    Mashrafi, S. T.; Salapaka, S. (University of Illinois at Urbana-Champaign); Preissner, C. (Argonne National Laboratory)
  8. Development of Dynamic Model to Estimate the Frequency Response of Four-Axis Machine Tools
    Song, C-K.; Lee, C-H. (Korea Institute of Machinery & Materials (KIMM)); Dinh, P. V. (Korea University of Science and Technology)
  9. Decouplable Coarse-Fine Stage for Improved Precision and Efficiency in Point-to-Point Positioning
    Yoon, D.; Zeng, B.; Okwudire, C. E. (University of Michigan)
  10. Software-Based Compensation of Vibration-Induced Errors of a Commercial Desktop 3D Printer
    Yoon, D.; Duan, M.; Okwudire, C. E. (University of Michigan)

Micro and Nano Technologies

  1. Microassembly Development for an Advanced Micromirror Array
    Enstrom, K. G.; Uphaus, T. M.;  Panas R. M.; Harvey, C. (Lawrence Livermore National Laboratory)
  2. Fabrication of Polycrystalline Diamond Molds by Micro EDM
    Kasai, S.; Yan, J. (Keio University); Sodetai, T. (Seiko Instruments, Inc.)
  3. Numerical and Experimental Investigations into Production of Hierarchical Textures
    Patel, D. S.; Thalkar, M.; Jain, V. K.; Ramkumar, J. (Indian Institute of Technology Kanpur)
  4. Wafer Scale Exfoliation of Monocrystalline Micro-Scale Silicon Films
    Ward, M.; Cullinan, M. A. (The University of Texas at Austin)
  5. Development of Micro Ball Forming to Process Micro Structure on Curved Surface
    Yamaguchi, K.; Nakano, T.; Kakutani, S.; Ota, M.; Egashira, K. (Kyoto Institute of Technology)
  6. Design and Modelling of a Bidirectional MEMS Thermal Actuator
    Zhao, C.; Ladner, I. S.; Cullinan, M. A. (The University of Texas at Austin); Song, A.; Hopkins J. B. (University of California – Los Angeles)

Precision Manufacturing Machines and Technologies

  1. Investigation in Micro-EDM Techniques for Laser Target Application
    Andre, J.; Barnay, N.; Gregoire, A.; Chicanne, C.; Theobald, M. (CEA)
  2. Mechanical Machining Processes for Laser Target Manufacturing
    Andre, J.; Schunck, J.; Gregoire, A.; DeDemo, G.; Chicanne, C.; Theobald, M. (CEA)
  3. Precision Hard Turning on a Lathe Retrofitted with an Oil Hydrostatic Spindle
    Arneson, D. A.; Knapp, B. R. (Professional Instruments Company)
  4. Thermal Errors of a Large 5-Axis Machine Tool Due to Cutting Fluid Influences – Evaluation with Thermal Test Piece
    Blaser, P.; Wiessner, M.; Wegener, K. (Institute of Machine Tools and Manufacturing ETH Zürich); Hernandez-Becerro, P.; Mayr, J. (inspire AG)
  5. Stability in Modulated Tool Path Turning
    Copenhaver, R.Ziegert, J. C.; Schmitz, T. L. (University of North Carolina-Charlotte)
  6. Fundamental Experiments of Additive Manufacturing Method by Selective Solidification Using Electrical Discharge
    Furutani, K.; Tsuchiya, T.; Yamagishi, H. (Toyota Technological Institute)
  7. Effect of the Additive Manufacturing Process on Cutting Forces in Hybrid Manufacturing
    Gomez, M.; Honeycutt, A.; Schmitz, T. L. (University of North Carolina-Charlotte); Heigel, J. (National Institute of Standards & Technology)
  8. Precision Manufacturing of Internal Involute Gears Using 5-Axis Milling Center
    Groover, J.; Goch, F. G. (University of North Carolina-Charlotte)
  9. Force Measurement in Diamond Micro-Chiseling
    Gurganus, D. K.; Sizemore, N. E.; Owen, J. D.; Davies, M. A. (University of North Carolina-Charlotte)
  10. An Examination of Surface Location Error and Surface Roughness for Period-2 Instability in Milling
    Honeycutt, A.; Schmitz, T. L. (University of North Carolina-Charlotte)
  11. Fixed-Free Beam Dynamics Prediction for Thin Rib Machining by RCSA
    Honeycutt, A.; Schmitz, T. L. (University of North Carolina-Charlotte)
  12. The Challenges and Consequences of Material Uncertainties in Metal Laser Powder Bed Fusion
    Jared, B. H.; Boyce, B.; Madison, J. D.; Ostien, J.; Rodelas, J.; Salzbrenner, B.; Swiler, L. P.; Underwood, O. D.; Saiz, D. J. (Sandia National Laboratories)
  13. Analysis of Hydrophobicity of Micro-Channel and Micro-Pillar Patterns of Polymer for Orthodontic Retainer Fabricated by Mechanical Machining Process
    Je, T-J.; Jeong, J-Y.; Lee, J-R; Jeon, E-C; Choi, D-S. (Korea Institute of Machinery & Materials (KIMM))
  14. Multi-probe Error Separation
    Keller, E. E.; Marsh, E. R.;  Arneson, H. D. (The Pennsylvania State University); Knapp, B. R.; Arneson, D. A. (Professional Instruments Company)
  15. Measurement of Dynamic Characteristics of Hydrostatic Spindle Against Radially Applied External Forces
    Kirigaya, R.; Nakao, Y. (Kanagawa University);  Hayashi, A. (Kanazawa Institute of Technology) Fedorynenko, D. (Chernihiv National University of Technology)
  16. Laser Augmented Diamond Drilling Operation Using A Rotating Tool Design
    Mohammadi, H.; Patten, J. A. (Western Michigan University)
  17. UPC 300 Ultra Precise Diamond Turning Machine Optimized for Freeform Production
    Niehaus, F.; Huttenhuis, S. (Schneider GmbH & Co. KG); Gauch, D. (Schneider Optical Machines, Inc.)
  18. Dry Planarization Method Using a Transpport of Reactive Species
    Ryokume, R.; Miyazaki, T.; Matsuyama, S.; Sano, Y.;  Yamauchi, K. (Osaka University)
  19. Manufacture and Assembly of Precision Planar Samples for Experiments at the National Ignition Facility
    Savage, L; Castro, C.; Vargas, R. J.;  Seugling, R. M.; Nikroo, A. (Lawrence Livermore National Laboratory); Lament, M. (Schafer Livermore Laboratory)
  20. M-Uber:  Uber-Type Assignment for Distributed Operator Machining Operations
    Schmitz, T. L.; Ziegert, J. C. (University of North Carolina-Charlotte); Greis, N (University of North Carolina-Chapel Hill)
  21. Milling of High-Alloyed Steel Molds for Precision Injection Molding of Microfluidical Parts
    Schmuetz, J. (Beuth University of Applied Sciences)
  22. Fiber Based Tools for Precision Polishing Applications
    Shahinian, H.;Hassan, N.; Cherukuri, H. P.; Mullany, B. A. (University of North Carolina-Charlotte)
  23. On Gyroscope Mechanism for Mobile Machining Machine
    Shim, J.; Heo, S.; Hwang, J.; Ro, S-K. (Korea Institute of Machinery & Materials (KIMM))
  24. Material Behavior in Ultra-Precision Flycutting of Germanium
    Sizemore, N. E.; Shanmugam, P.; Owen, J. D.; Davies, M. A. (University of North Carolina-Charlotte); Meyer, D. (Foundation Institute of Materials Science)
  25. How to Realize the Self-Protective Tool During Cutting of Difficult-Cut Material?
    Song, X.; Takahashi, Y.; Ihara, T. (Chuo University)
  26. Precision Polishing Technology of Ferroelectric PMN-PT Single Crystals for Smoother Surfaces
    Takahashi, H.; Suzuki, H. Y.; Namba, Y. Y. (Chubu University)
  27. Temperature Measurement of Burnishing Process by Electro-Conductive Tool
    Tanaka, H.; Tanaka, H.; Sakamoto, H. (Sophia University)
  28. Inverted Diamond Cutting of Right Triangular Retroreflectors: Surface Quality and Cutting Forces
    Tauhiduzzaman, M.; Bordatchev, E. V. (National Research Council of Canada); Milliken, N.; Tutunea- Fatan, R. R. (Western University)
  29. Fundamental Study on Thermal Stability of Micro Milling Spindle Supported by Water Hydrostatic Bearings Under Spindle Rotation
    Yaguchi, T.; Nakao, Y. (Kanagawa University); Hayashi, A. (Kanazawa Institute of Technology)
  30. Laser Cutting Out Process for Semiconductor Substrates Applying Laser Slicing Method
    Yamada, Y.; Saitama T.; Ikeno, J.-I. (Saitama University)
  31. Improving Surface Quality of Thin-Walled Double Side Aspheric Component by Machining Process and Measurement Optimization
    Zha, J.; Chu, J.; Chen, Y.; Li, Y. (Xi’an Jiaotong University)