Alex Schafgans is the Head of Development & Engineering at ASML San Diego. Since joining ASML/Cymer in 2011 as a Scientist, Alex has played a pivotal role in advancing EUV Source technology. His work has spanned fundamental research and system-level engineering, contributing significantly to the definition, development, and industrialization of the breakthrough 250W EUV Source for high-volume semiconductor manufacturing. He has also led efforts in early demonstrations of 500W capability and the advancement of 1μm pre-pulse technologies, which are foundational to the upcoming 600W Source product architecture. He holds BS, MS, and PhD degrees in Physics from the University of California, San Diego.