In Person Only
11-Cleaning with Elements of Contamination Control
Peter van der Heijden, Paul de Heij, VDL Enabling Technologies Group
Tuesday, October 11, 2022
1:30PM – 5:30PM (PDT USA)
CLEANING AND CONTAMINATION CONTROL FOR ULTRA HIGH AND ULTRA CLEAN VACUUM
C&CC FOR UHV & UCV
Content
• Introduction
• System requirements
• UHV
• UCV
• C&CC
• Manufacturing including joining techniques
• Cleaning
• Assembly
• Qualification
• Packaging
• Wrap up
Peter van der Heijden
Expert Vacuum and Cleaning Technologies
VDL ETG Technology & Development
Paul de Heij
VDL ETG T&D
PhD in Materials Science & Engineering
C&CC specialist
Space industry (6y)
Semiconductor industry (5y)