Oral Sessions
Session 1: Precision Controls and Mechatronics
Co–Chairs: David L. Trumper (Massachusetts Institute of Technology) and Stephen J. Ludwick (Aerotech, Inc.)
Wednesday, October 12, 2022
8:00 AM – 9:45 AM
- Pushing the Limits of Speed, Form Accuracy, Surface Finish, and Waviness of SPDT by Means of Fast Tool Servos
Takeshi Hashimoto, Jeffery W. Roblee, Sam Roseman, Cindy Ding (AMETEK Precitech) - Decoupled, Closed-Loop, Multi-DoF Rotation of a Spherical Permanent Magnetic Dipole Actuator
Tyler T. Hamer, Joshua Chabot (MIT Lincoln Laboratory); David L. Trumper (Massachusetts Institute of Technology) - Real-Time Command Generator for Dual-Stage Processing Machines
Shingo Tajima (Tokyo Institute of Technology); Burak Sencer (Oregon State University) - Transcending the Acceleration-Bandwidth Trade-Off: Lightweight Precision Stages with Active Control of Flexible Dynamics
Jingjie Wu, Lei Zhou (University of Texas at Austin) - A Model-based Control Framework for Microscale Selective Laser Sintering
Heejin Kim, Chinedum Okwudire (University of Michigan); Joshua Grose, Aaron Liao, Michael A. Cullinan (The University of Texas at Austin)
Commercial Presenters: Aerotech, Inc. | ABTech, Inc. | Attocube Systems, Inc. | Professional Instruments Company | New Way Air Bearings
Session 2: Precision Metrology and Characterization I
Co–Chairs: Jonathan D. Ellis (Micro-LAM, Inc.) and Kevin E. Elliott (Corning Inc.)
Wednesday, October 12, 2022
10:00 AM – 11:30 AM
- An Ultra-Low-Loss Chip-Scale Torsion Balance
Charles A. Condos, Aman R. Agrawal, Christian M. Pluchar, Dalziel Wilson (University of Arizona); Robert Ilic, Stephan Schlamminger, Jon R. Pratt (National Institute of Standards and Technology) - A Miniature Electrostatic Force Balance for Laser Power Measurements
Kumar Arumugam, Gordon A. Shaw (National Institute of Standards and Technology) - Precision Engineering for Gravitational Experiments
S. Schlamminger, L. Chao, V. Lee, D.B. Newell, J.R. Pratt (National Institute of Standards and Technology); C.C. Speake (University of Birmingham , UK) - Precision Sensing of Gravitational Acceleration
Jon R. Pratt, Stephan Schlamminger, Robert Ilic (National Institute of Standards and Technology); Dalziel Wilson, Charles A. Condos (University of Arizona); Felipe Guzman, Andrea Nelson (Texas A&M)
Commercial Presenters: Panasonic | Taylor Hobson, Inc. | Corning Tropel Corporation | SIOS Meßtechnik GmbH | Starrett Tru-Stone Technologies
Session 3: Precision Engineering in Virtual and Augmented Reality
Chair: Tim M. Dalrymple (Motion Systems Opto-Mechanical Consultant) and Phil Harvey (Microsoft)
Thursday, October 13, 2022
8:00 AM – 9:45 AM
- Manufacturing Metrology for Alternative-reality Optical Displays
Peter J. de Groot (Zygo Corporation) - Microstructured Optical Fibers for Scanning Display Systems in Augmented Reality
Tim Dalrymple (Motion Systems Opto-Mechanical Consultant) - Focus Tunable Lenses for AR/VR/MR – Advances in Formfactor and Weight
Roman Patscheider (Optotune Switzerland AG) - Use of Precision Engineering to Develop a High Volume Waveguide Manufacturing Solution Enabling a Smaller AR Display
Roy Patterson, Satish Sadam, Sebastian Kulessa, Bob Tekolste, Jeff Schmulen, Scott Carden (Magic Leap) - The Use of Augmented and Virtual Reality in a Large Precision Engineering Company
Thomas C. Weinlandt (ASML)
Commercial Presenters: Zygo | MI-Partners | MLOptic Corporation | TOWA USA Corporation | Optikos Corporation
Session 4: Precision Metrology and Characterization II
Co-Chairs: Steven R. Gillmer (MIT Lincoln Laboratory) and Felipe N. Guzman (Texas A&M University)
Thursday, October 13, 2022
10:00 AM – 11:30 AM
- Advances in Optomechanical Inertial Sensing
Andrea Nelson, Yanqi Zhang (University of Arizona); Adam Hines, Felipe Guzman (Texas A&M University) - Hysteresis of Probes for On-Machine Measurements
Adam Woźniak, Marta Rępalska (Warsaw University of Technology) - Axial Shift Mapping for Absolute Metrology of X-ray Telescope Mirrors
Hayden J. Wisniewski, Ian J. Arnold, and Brandon D. Chalifoux (The University of Arizona); Ralf K. Heilmann, Mark L. Schattenburg (Massachusetts Institute of Technology)
Commercial Presenters: Lion Precision | HEIDENHAIN CORPORATION | Prior Scientific/Queensgate | Optical Perspectives Group
Session 5: Precision Design
Co-Chairs: Leon Chao (National Institute of Standards and Technology) and Kumar Arumugam (National Institute of Standards and Technology)
Thursday, October 13, 2022
1:30 PM – 3:15 PM
- Two Degree-of-Freedom Flexure Mechanisms with Variable Stiffness
Sam Shimohara, Ryan Lee, Jonathan B. Hopkins (University of California, Los Angeles) - Characterization and Alignment of the Flexure Mechanism for the New Kibble Balance at NIST
Lorenz Keck, Frank Seifert, David Newell, Darine Haddad (National Institute of Standards and Technology); René Theska (Technische Universitaet Ilmenau) - Cost-Effective High-Precision Magnetically Levitated Positioning Stage Technology
Jos de Klerk, Rob Verkooijen, Thomas van der Zijden, Ton Peijnenburg, Francesco Patti, Rob Boereboom (VDL ETG) - The Sample Positioning Stage for the Sapoti Nanoprobe at the Carnaúba Beamline at Sirius/LNLS
Renan R. Geraldes, Gabriel B. Z. L. Moreno, João L. de Brito Neto, H. C. N. Tolentino (Brazilian Synchrotron Light Laboratory (LNLS)); T. A. M. Ruijl, W. Aarden, P. Peters (MI-Partners) - A Massively Overconstrained and Statically Balanced Flexure Mechanism for a 20 kN Load Capacity
Jan J. de Jong, Marijn Nijenhuis, Dannis M. Brouwer (University of Twente)
Commercial Presenters: Lawrence Livermore National Laboratory | Vermont Photonics | UNC Charlotte-Center for Precision Metrology | NCSU-Precision Engineering Consortium | University of Tennessee, Knoxville
Session 6: Precision Manufacturing
Co-Chairs: Stephen J. Furst (Smart Material Solutions, Inc.) and Ping Guo (Northwestern University)
Friday, October 14, 2022
8:00 AM – 9:45 AM
- Form Error Compensation of Freeform Surfaces by Gaussian RBF Interpolants
Christopher Morgan (Moore Nanotechnology Systems, LLC) - In-Situ Metrology and 3D Error Compensation for Precision Aspheres in Virtual Reality Viewing Optics
Neil Naples (AMETEK Precitech); Alex Sohn (Meta Reality Labs) - Robotic Smoothing of Diamond Turning Signature on Optical Silicon
Daniel R. Brooks, Jennifer Coniglio, Jessica DeGroote Nelson (Optimax Systems, Inc.) - Ultrafast Laser Stress Figuring Using On-Machine Differential Deflectometry
Kevin A. Laverty, Marcos A. Esparza, Daewook Kim, Brandon D. Chalifoux (University of Arizona) - A Study of Surface Morphology Evolution in Fluid Jet Polishing
Zhang Zili, Cheung Chi Fai, Wang Chunjin, Ho Lai Ting, Guo Jiang (The Hong Kong Polytechnic University)
Commercial Speakers: Ametek Precitech, Inc. | Moore Nanotechnology Systems, LLC (Nanotech) | OptiPro Systems | Chardon Tool | Cranfield Precision, Division of Fives Landis Ltd.
Session 7: Micro Nano
Co-Chairs: Michael A. Cullinan (The University of Texas at Austin) and Robert M. Panas (Bright Silicon Technologies)
Friday, October 14, 2022
10:00 AM – 11:45 AM
- Nanophotonic Technology for Optical Imaging, Computing and Communication
Arka Majumdar (University of Washington-Seattle) - Low-Cost and High-Throughput Printing of Polymeric Nanostructures via Projection of Superluminescent Light
Jungho Choi, Sourabh K. Saha (Georgia Institute of Technology) - Design Concerns for Tip-Based Measurement Towards Process Metrology in Roll-to-Roll Nanomanufacturing
Liam G. Connolly, Barbara Groh, James A. Garcia, Michael A. Cullinan (The University of Texas at Austin) - Design and Manufacturing of Microscale Mechanical Logic Circuits
Hilary A. Johnson, Alexander H. Slocum (Massachusetts Institute of Technology); John Cortes, Logan Bekker (Lawrence Livermore National Laboratory); Robert M. Panas (Bright Silicon Technologies); Amin Farzaneh, Jonathan B. Hopkins (University of California Los Angeles) - Fabrication of High Average Power Output Diffraction Gratings for Ultrafast Pulsed Laser Application
Vidhukiran Venkataraman, Harnjoo Kim, Jungho Choi, Suvrat Jain, Sourabh. K Saha (Georgia Institute of Technology)
Commercial Speakers: ASML | NTS Group | VDL Enabling Technologies Group