Technical Sessions
Session I
Interferometry and Optics
Tuesday, November 15, 2011, 8:30 AM – 10:00 AM
Session Chair: Robert D. Grejda (Corning Tropel Corporation) and Robert E. Parks (University of Arizona)
- A Novel Distance-measuring Interferometer for Rotary-linear Stage Metrology with Shape Error Removal
Di Regolo, J. A.; Ummethala, U. (KLA-Tencor) - Towards Fiber-coupled Displacement Measuring Interferometers
Ellis, J. D. (University of Rochester); and Meskers, A. J. H.; Spronck, J. W.; Munnig Schmidt; R. H. (Delft University of Technology) - Evaluation of the Measurement Performance of a Coherence Scanning Microscope Using Roughness Specimens
Badami, V. G.; Liesener, J.; de Groot, P. J. (Zygo Corporation) and Evans, C, J. (University of North Carolina at Charlotte) - Fiber-optic Interferometry for X-ray Microscopy
Nazaretski, E.; Eom, D.; Kim, J.; Yan, H.; Chu, Y.S. (Brookhaven National Laboratory); Shu, D. (Argonne National Laboratory); and Braun, P.-F. (attocube systems AG) - Research in Novel Polishing Processes for Off-axis Mirror Segments
Walker, D. D.; Yu, G. (Glyndwr University); Evans, R. (OpTIC-Glyndwr); and Li, H. (University College London)
Session II
Precision Manufacturing
Tuesday, November 15, 2011, 10:30 AM – 12:00 PM
Session Chair: Brian P. O’Connor (Aerotech, Inc.) and Hans-Jochen Trost (MicroFab Technologies, Inc.)
- Application of Precision Engineering to the James Webb Space Telescope Primary Mirror
Lewis, J. (Ball Aerospace & Technologies Corp.) - Alignment Fixture for Kinematic Mounts of Scientific Instruments on Hubble Space Telescope
Knapp, B. R.; Liebers, M. J.; Sanner, S. L.; (Professional Instruments Company, Inc.) - Nickel Plated Metal Mirrors for Advanced Applications
Gebhardt, A.; Scheiding, S.; Kinast, J.; Risse, S.; Duparré, A.; Trost, M. (Fraunhofer Institute for Applied Optics and Precision Engineering IOF); Rohloff, R.-R.; Schönherr, V. (Max-Planck-Institut für Astronomie MPIA); and Giggel, V.; H. Löscher (Carl Zeiss Jena GmbH) - Precision Engineering in Concentrating Solar Systems
Shelef, B.; Erez, S. (Heliocentric Solar Technologies) - Continuous Contact Control for Microcontact Printing Using Precision Position Stage with Optical Feedback
Petrzelka, J. E.; Hardt, D. E. (Massachusetts Institute of Technology)
Session III
Multi-Axis Machine Design
Wednesday, November 16, 2011, 8:30 AM – 10:00 AM
Session Chair: Byron R. Knapp (Professional Instruments Company, Inc.) and Mark Kosmowski (Electro Scientific Industries, Inc.)
- Progress on High Precision Maglev Stage Technology for Parallel High-Throughput Reflective Electron Beam Direct Write Lithography
Ummethala, U.; Clyne, J.; Di Regolo, J.; Hale, L. C.; Hench, J.; Wei, Z. (KLA-Tencor Corporation) and Angelis, G. Z.; van Lievenoogen, A. (Philips Innovation Services) - Design and Experimental Characterization of a Large Range XYZ Parallel Kinematic Flexure Mechanism
Awtar, S.; Ustick, J. E. (University of Michigan – Ann Arbor) - Design and Characterization of a Visual Metrology Instrument with a 5-axis Motion System
Lawson, B. L.; Montesanti, R. C.; Edson, S. L.; Horner, J. B.; Witte, M. C.; Di Nicola, P.; Kalantar, D. H.; Wallace, R. J.; Hughes, J. D.; Antipa, N. A. (Lawrence Livermore National Laboratory); Heidl, B. F.; Vonhof, S. A.; Howland, F. A. (Akima Infrastructure Services, Inc.); and Ludwick, S. J. (Aerotech, Inc.) - Design and Testing of a High Accuracy Robotic Single-cell Manipulator
Yoon, J. Y.; Trumper, D. L. (Massachusetts Institute of Technology) - Development of a 3D Surface Mapping System to Inspect Capsule Fill-tube Assemblies used in Laser-driven Fusion Targets
Buice, E. S.; Antipa, N. A.; Bhandarkar, S.; Biesiada, T. A.; Conder, A. D.; Dzenitis, E. G.; Flegel, M. S.; Hamza, A. V.; Heinbockel, C. L.; Horner, J. B.; Johnson, M. A; Kegelmeyer, L. M.; Meyer, J. S.; Maranvile, B. L.; Montesanti, R. C.; Reynolds, J.L.; Taylor, J. S.; Wegner, P. J. (Lawrence Livermore National Laboratory); and Alger, E. T.(General Atomics)
Session IV
Precision Metrology
Wednesday, November 16, 2011, 10:30 AM – 12:00 PM
Session Chair: Jonathan E. Ellis (University of Rochester) and Marcin B. Bauza (Carl Zeiss, IMT)
- Measurement Comparisons Between Optical and Mechanical Edges for a Silicon Micromachined Dimensional Calibration Standard
Tran, H. D. (Sandia National Laboratories); Emtman, C. E.; Zwilling, A. M. (Micro Encoder, Inc.); and Salsbury, J. G.; Wright, W. (Mitutoyo America Corporation) - A Six-degree-of-freedom Motion Characterization of Ballscrew-driven Stage Using a Single Unit of an Optical Encoder
Lee, C.B.; Kim, G.-H.; Lee, D.-J.; Lee, S.-K. (Gwangju Institite of Science & Technology (GIST)) - Verifying the Capability of a Three Axis Vibrating Micro-scale CMM Probe to Operate in a Noncontact Mode
Claverley, J. D.; Leach, R. K. (National Physical Laboratory) - Ultra-precision Linear Motion Metrology of a Commerically Available Linear Translation Stage
Fesperman Jr., R. R.; Donmez, M. A.; Moylan, S. P. (National Institute of Standards and Technology) - A New Way of Analyzing Motion System Repeatability for Nanometer Precision: 6-dof Point Repeatability
Brown, N. (ALIO Industries)
Session V
Nano-Positioning
Wednesday, November 16, 2011, 1:30 PM – 3:00 PM
Session Chair: Pradeep K. Subrahmanyan (Data Physics Corporation) and Senajith B. Rekawa (Lawrence Berkeley National Laboratory)
- A Two Degree-of-freedom SOI-MEMS Translation Stage with Closed Loop Positioning
Koo, B.; Ferreira, P. M.; (University of Illinois at Urbana-Champaign); and Dong, J. (North Carolina State University) - Compliant Microgripper with Parallel Straight-line Jaw Trajectory for Nanostructure Manipulation
Beroz, J. D.; Awtar, S.; Bedewy, M.; Hart, A. J. (University of Michigan) - Interferometric Controlled Planar Nanopositioning System with 100 mm Circular Travel Range
Hesse, S.; Schäffel, C.; Katzschmann, M. (Institut für Mikroelektronik- und Mechatronik Systeme GmbH); and Buechner, H.-J. (Technische Universität Ilmenau) - Non-Lithographically-Based Microfabrication of Precision MEMS Nanopositioning Systems
Panas, R. M.; Cullinan, M. A.; Culpepper, M. L. (Massachusetts Institute of Technology) - Flexure-based, Parallel Nano-positioning Robot
Van Doren, M. J. (Van Doren Designs, LLC); Dornfeld, W. H. (ASML Wilton); and Marsh, E. R. (The Pennsylvania State University)
Session VI
Precision Machining Processes
Thursday, November 17, 2011, 8:30 AM – 10:00 AM
Session Chair: Mark A. Stocker (Cranfield Precision) and Allen Y. Yi (The Ohio State University)
- Nanocoining of Optical Features
Zdanowicz, E. M.; Dow, T. A.; Scattergood, R. O. (North Carolina State University) - 3-D Metrology and Correction of Aspheric Diffractive Optics
Stover, E. (AMETEK Taylor Hobson); Roblee, J. W. (AMETEK – Precitech, Inc.) - Microfabrication of Terahertz Vacuum Electronic Devices
Barchfeld, R. A.; Gamzina, D.; Shin, Y.-M.; Barnett, L. R.; Luhmann, N. C. (University of California, Davis); and Kim, J.; Alldritt, C. (Mori Seiki) - Improved Surface Finish in Steel Despite Excessive Tool Wear Using Elliptical Vibration Assisted Machining
Lane, B. M.; Dow, T. A.; Scattergood, R. O.(North Carolina State University) - 5-Axis Grinding of Micro-Patterns with Adjusted Grinding Wheels
Denkena, B.; Köhler, J.; Krawczyk, T. (Leibniz University Hannover)
Session VII
Control of Precision Machines
Thursday, November 17, 2011, 10:30 AM – 12:00 PM
Session Chair: Stephen J. Ludwick (Aerotech, Inc.) and Luis A. Aguirre (3M Company)
- Design and Control of a MEMS Micropositioner Array for Coordinated Motion Tasks
White, P.; Bristow, D. A. (Missouri University of Science & Technology) - Effect of Sampling Jitter and Control Jitter on Positioning Error in Motion Control Systems
Smeds, K.; Lu, X. (The University of British Columbia) - Model-based Automated Controller Tuning
Gao, X.; Mishra, S. (Rensselaer Polytechnic Institute) - Precision Motion Control of Ultrahigh-acceleration and High-velocity Linear Drive Mechanism
Sato, K. (Tokyo Institute of Technology) - Harmonic Disturbance Rejection in Tracking Control of Ball Screw Drives
Hosseinkhani, Y.; Erkorkmaz, K. (University of Waterloo)
Session VIII
Precision Component Design
Thursday, November 17, 2011, 1:30 PM – 3:00 PM
Session Chair: Deming Shu (Argonne National Laboratory) and Eric S. Buice (Lawrence Livermore National Laboratory)
- Design Concepts for Electro- and Magneto-Static Nanoimaging
Lang, J.; Zahn, M.; Cannon, B.; and Trumper, D. L. (Massachusetts Institute of Technology) - A Novel Long-Stroke Planar Motor
Lu, X.; Usman, I. (The University of British Columbia) - Intrinsic Damping of Linear Halbach Brushless Motors
Ruben, S. D.; Tsao, T.-C. (University of California at Los Angeles); Lemmons, T. D.; Caskey, G. W.; Hocken, R. J. (University of North Carolina at Charlotte) - Hydrostatics on a Half Shell
Slocum, A. H.; Wong, A. (Massachusetts Institute of Technology)