Systems Engineering 1 & 2

Systems engineering is an interdisciplinary field of engineering and engineering management that focuses on how to design, integrate, and manage complex systems over their life cycles. At its core, systems engineering utilizes systems thinking principles to organize this body of knowledge.” This is what Wikipedia says about SE. While SE is well established and standardized in industries such as aerospace and automotive, in high-tech equipment the application is more diverse. The basic principles are similar, such as doing requirements management, but a domain specific flavor is used. Typically in high-tech equipment the volumes are low, complexity can be extremely high, unreliability affects productivity and not human lives and time to market is critical. This leads to a specific way of “doing SE” and this tutorial will thus focus on precision engineered high-tech equipment.

Part 1Ton Peijnenburg and Jos de Klerk

After a general introduction of the tutors and the field of SE, three topics will be discussed, covering the range from “why” via “what” to “how”. Underlying will be the general SE principles, e.g. breaking down a system in modules, and the steps will be illustrated for a high-tech semiconductor equipment tool. In a first block, the starting points of a system development will be explored. Secondly, techniques for system error budgeting are discussed, including how statistics will affect these. Third and lastly, the balancing of system parameters will be explained, and how to maximize value while minimizing parameters such as cost and risk.

Part 2Ton Peijnenburg, Jos de Klerk, and Dr. Vivek G. Badami

In the second part of the tutorial, a case will be studied in more detail, focusing on a set of topics that are central to systems engineering. The case will be a precision mechatronic module which will be studied as part of the system it is part of. Topics to be studied as part of the case will include requirements elicitation and analysis; system budgeting; system modeling; system breakdown, interfaces and dependencies; trade-off analysis. This second part is suitable for people with experience in systems engineering, or as extension to part 1.

Ton Peijnenburg, VDL ETG Technology & Development

Ton Peijnenburg leads the Systems Engineering group at VDL ETG Technology & Development, where he is also deputy general manager. VDL ETG is a contract development and manufacturing partner for high-tech equipment. In 2005, Ton was appointed research fellow at the High Tech Systems Center of Eindhoven University of Technology. A main focus is the development of a systems engineering and systems thinking curriculum at the university. He studied Electrical Engineering at Eindhoven University of Technology where he obtained his MSc in 1992.

Jos de Klerk, VDL ETG Technology & Development

As of May 1st, 2020, Jos de Klerk is a senior system engineer at VDL ETG, Eindhoven, The Netherlands, where he is involved in multiple high tech innovative and complex product developments and is setting up an internal system engineering education program. Jos has 26 years of experience in the semiconductor industry and has worked at ASML for 23 years, of which 15 years as a system engineer. Jos holds a MSc degree in Physics from Delft University of Technology.

Dr. Vivek G. Badami, Zygo Corporation

Dr. Vivek G. Badami is a Technology Fellow in the Innovations Group at Zygo Corporation where he is focuses on systems architecture, precision engineering, and precision manufacturing for the development of ultra-high precision sensors, optics, and metrology systems.