ASPE Proceedings, October 4- October 9, 2009, Monterey, CA

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Session I Commodization of Precision - Challenges and Opportunities
Tuesday, October 6, 2009, 8:30 am - 10:00 am
Session Chair: Pradeep K. Subrahmanyan (RAPT Industries, Inc.) and Thomas A. Dow (North Carolina State University)

  1. Advances in Areal Density for Disk Drives (Invited Paper)
    Sacks, A. (Seagate Technology, LLC)
    Commodization of Precision/Oral/Abstract/2009 Annual
  2. A Short History of Diamond Machining (Invited Paper)
    Marsilius, N. M. (Moore Tool Company, Inc.)
    Commodization of Precision/Oral/Abstract/2009 Annual
  3. From Semiconductors to Photovoltaics (Invited Paper)
    Pinto, M. (Applied Materials, Inc.)
    Commodization of Precision/Oral/Abstract/2009 Annual
  4. Nanotechnology (Invited Paper)
    Teague, E. C. (National Nanotechnology Coordination Office)
    Commodization of Precision/Oral/Abstract/2009 Annual


Session II Design of Precision Machines and Instruments I
Tuesday, October 6, 2009, 10:30 am - 12:00 pm
Session Chair: Mark A. Stocker (Cranfield Precision) and Eric S. Buice (Delft University of Technology)

  1. Development of a Novel, Ultra-precision Spindle
    Bauza, M. B.; Woody, S. C. (InsituTec, Inc.); and Smith, S. T. (University of North Carolina at Charlotte)
    Design of Precision Machines and Instruments I/Oral/Abstract/2009 Annual
  2. Design of a Six Degree of Freedom Nanopositioner for Use in Massively Parallel Probe-based Nanomanufacturing
    DiBiasio, C. M.; Culpepper, M. L. (Massachusetts Institute of Technology)
    Design of Precision Machines and Instruments I/Oral/Abstract/2009 Annual
  3. Quick-repeat Coupling: A Repeatable Work-holding Fixture for Ultra-precision Turning and Grinding Machines
    Hale, L. C.; Martin, G. L.; Chung, C. A.(Innovative Machine Solutions, LLC)
    Design of Precision Machines and Instruments I/Oral/Abstract/2009 Annual
  4. Prototype of a Planar Guided Milling Machine for High Precision Applications
    Jaumann, S.; Weikert, S.; Wegener, K. (inspire AG)
    Design of Precision Machines and Instruments I/Oral/Abstract/2009 Annual
  5. Elastic Element Showing Low Stiffness Loss at Large Deflection
    Brouwer, D. M.; Meijaard, J. P.; Jonker, J. B. (University of Twente)
    Design of Precision Machines and Instruments I/Oral/Abstract/2009 Annual


Session III Dimensional Metrology
Wednesday, October 7, 2009, 8:30 am - 10:00 am
Session Chair: Eric R. Marsh (The Pennsylvania State University) and Kate M. Medicus (Mitutoyo Research Center Europe)

  1. Volumetric Error Mapping Techniques for the NIST M48 Coordinate Measuring Machine
    Stoup, J. R.; Faust, B. S. (National Institute of Standards and Technology)
    Dimensional Metrology/Oral/Abstract/2009 Annual
  2. Realization of Isara 400: A Large Measurement Volume Ultra-precision CMM
    Donker, R. L.; Widdershoven, I.; Brouns, D.; Spaan, H. A. M. (IBS Precision Engineering BV)
    Dimensional Metrology/Oral/Abstract/2009 Annual
  3. The Measurement of Dimensional Metrology
    Smythe, R. A. (R. A. Smythe Management Consultants)
    Dimensional Metrology/Oral/Abstract/2009 Annual
  4. The Spherical Profilometer Polaris 3D
    Sohn, A.; Garrard, K. P.; Dow, T. A. (North Carolina State University)
    Dimensional Metrology/Oral/Abstract/2009 Annual
  5. Full Five Degree-of-freedom Error Characterization of Ultra-precision Spindles Using the Multiprobe Method
    Knapp, B. R.; Arneson, D. A. (Professional Instruments Company, Inc.); and Marsh, E. R.; Sommer, E. J. (The Pennsylvania State University)
    Dimensional Metrology/Oral/Abstract/2009 Annual

Session IV Applications of Precision Engineering in Manufacturing I
Wednesday, October 7, 2009, 10:30 am - 12:00 pm
Session Chair: Jeffrey W. Roblee (AMETEK-Precitech, Inc.) and Bradley H. Jared (Sandia National Laboratories)

  1. Design of a Precision Transfer Line for Dip-pen Nanolithography
    Slocum Jr., A. H.; Culpepper, M. L (Massachusetts Institute of Technology)
    Applications of Precision Engineering in Manufacturing I/Oral/Abstract/2009 Annual
  2. Manufacturing of Freeforms with Well Defined Reference Structures
    Gebhardt, A.; Scheiding, S.; Risse, S.; Steinkopf, R. (Fraunhofer Institute for Applied Optics and Precision Engineering - IOF)
    Applications of Precision Engineering in Manufacturing I/Oral/Abstract/2009 Annual
  3. MEMS Kinematic Clamp for Repeatable Precision Alignment
    Chan, M. W.-J.; McCoy, C. D.; Wodin-Schwartz, S.; Warren, C. G.; Vijayaraghavan, A. (University of California - Berkeley)
    Applications of Precision Engineering in Manufacturing I/Oral/Abstract/2009 Annual
  4. Ultra-planar Electrostatic Chucks Based on Low CTE Materials for Lithography and Metrology
    Risse, S.; Kalkowski, G.; Peschel, T.; Harnisch, G.; Müller, S.; Eberhardt, R. (Fraunhofer Institute for Applied Optics and Precision Engineering IOF)
    Applications of Precision Engineering in Manufacturing I/Oral/Abstract/2009 Annual

Session V Optics and Interferometry
Wednesday, October 7, 2009, 1:30 pm - 3:00 pm
Session Chair: Vivek G. Badami (Zygo Corporation) and Jonathan D. Ellis (Delft University of Technology)

  1. Compact, Multi-channel, Fiber-based Absolute Distance Measuring Interferometer System
    Badami, V. G.; Deck, L. L.; Fletcher, C. D.; Selberg, L. A.; Winkowski, D. O.; Egashira, Y.; Redlitz, K. (Zygo Corporation)
    Optics and Interferometry/Oral/Abstract/2009 Annual
  2. A Study of Modulated Interference Laser Encoder – New Approach for a High Resolution and High Stability Position Measurement System
    Makinouchi, S.; Imai, T.; Watanabe, A. (Nikon Corporation); Ohara, T. (Nanowave Inc.); and Takahashi, M.; Wakui, S. (Tokyo University of Agriculture and Technology)
    Optics and Interferometry/Oral/Abstract/2009 Annual
  3. Interferometrical System for High Precision Measurements of Flatness, Thickness and Parallelism of Mechanical Parts
    Drabarek, P.; Fleischer, M. (Robert Bosch GmbH)
    Optics and Interferometry/Oral/Abstract/2009 Annual
  4. Real-time Periodic Error Compensation with Low/Zero Velocity Parameter Updates
    Schluchter, C.; Chu, D. C. (Agilent Technologies, Inc.); and Ganguly, V.; Schmitz, T. L. (University of Florida)
    Optics and Interferometry/Oral/Abstract/2009 Annual
  5. Compact, Nanometer-resolution, Fiber-optic Encoder
    Tobiason, J. D.; Zwilling, A. M.; Emtman, C. E. (Micro Encoder, Inc.); and Takahashi, T.; Kawada, H. (Mitutoyo Corporation)
    Optics and Interferometry/Oral/Abstract/2009 Annual

Session VI Grinding, Polishing and Lapping
Wednesday, October 7, 2009, 5:00 pm - 6:30 pm
Session Chair: Byron R. Knapp (Professional Instruments Company, Inc.) and Michele H. Miller (Michigan Technological University)

  1. Testing Quantum Dots as a Means of Assessing Subsurface Damage in Polished Glass
    Williams, W. B.; Mullany, B. A.; Moyer, P. J.; Parker, W. C. (University of North Carolina at Charlotte); and Randles, M. H. (Northrop Grumman Synoptics)
    Grinding, Polishing and Lapping/Oral/Abstract/2009 Annual
  2. Creating Extreme Subsurface Integrity by Laser-induced Material Self-organization
    Yan, J.; Muto, S.; Kuriyagawa, T. (Tohoku University)
    Grinding, Polishing and Lapping/Oral/Abstract/2009 Annual
  3. Cross Crown Nanogrinding of a Chiplet for a Slider with an Integrated Microactuator (SLIM)
    Gatzen, H. H.; Cvetkovic, S. (Leibniz Universität Hannover)
    Grinding, Polishing and Lapping/Oral/Abstract/2009 Annual
  4. Flexible Polishing with Bounded Grains for Complex Ceramic Endoprostheses
    Denkena, B.; de Leon, L.; van der Meer, M.; Turger, A. (Leibniz Universität Hannover)
    Grinding, Polishing and Lapping/Oral/Abstract/2009 Annual

Session VII Novel Technologies
Thursday, October 8, 2009, 8:30 am - 10:00 am
Session Chair: Henny A. M. Spaan (IBS Precision Engineering BV) and Stephen J. Ludwick (Aerotech, Inc.)

  1. Dynamic Design for Improved Control
    van Eijk, J. (Technical University of Delft)
    Novel Technologies/Oral/Abstract/2009 Annual
  2. Thermal-elastic Compensation Models for Position Control
    Koevoets, M.; van der Sanden, J.; Ruijl, T. A. M. (Philips Applied Technologies)
    Novel Technologies/Oral/Abstract/2009 Annual
  3. MR Fluid Activated Spherical Joint for Precision Orientation Control
    Telleria, M. J.; Panas, R.; Culpepper, M. L. (Massachusetts Institute of Technology)
    Novel Technologies/Oral/Abstract/2009 Annual
  4. Magnetic Levitation for Precision Motion with Only Two Off-the-shelf Linear Motors and a Novel Passive Magnetic Bearing Design: Modeling and Control Challenges
    Nguyen, H.T.; Steinbuch, M. (Eindhoven University of Technology); and Angelis, G. Z.; Molenaar, E.; Sahin Nomaler, F.; Stoutjesdijk, H. (Philips Applied Technologies)
    Novel Technologies/Oral/Abstract/2009 Annual
  5. Validation of the Performance of a High-accuracy Compact Interferometric Sensor
    Badami, V. G.; Fletcher, C. D. (Zygo Corporation)
    Novel Technologies/Oral/Abstract/2009 Annual

Session VIII Design of Precision Machines and Instruments II
Thursday, October 8, 2009, 10:30 am - 12:00 pm
Session Chair: Keith Carlisle (Lawrence Livermore National Laboratory) and Deming Shu (Argonne National Laboratory)

  1. Synthesis of Multi-axis Serial Flexure Systems
    Hopkins, J. B.; Culpepper, M. L. (Massachusetts Institute of Technology)
    Design of Precision Machines and Instruments II/Oral/Abstract/2009 Annual
  2. Noise Reduction and Disturbance Rejection at the Sub-nanometer Level
    Overcash, J. L.; Hocken, R. J.; Stroup Jr., C. G. (University of North Carolina at Charlotte)
    Design of Precision Machines and Instruments II/Oral/Abstract/2009 Annual
  3. Cardan Joints with Axis Offset in Singularity Free Hexapod Structures for Nanometer Resolution
    Glöss, R. (Physik Instrumente (PI) GmbH & Co. KG)
    Design of Precision Machines and Instruments II/Oral/Abstract/2009 Annual
  4. Calculating Thermal Location and Component Errors on Machine Tools
    Mayr, J. (Institute of Machine Tools and Manufacturing (IWF)); and Ess, M.; Weikert, S.; Wegener, K. (inspire AG)
    Design of Precision Machines and Instruments II/Oral/Abstract/2009 Annual
  5. Mechanical Design and Practice of Artificial Channel-cut Crystal Stages for Bonse-Hart USAXS Instrument with 10-Nanoradian-scale Resolution and Stability
    Shu, D.; Ilavsky, J. (Argonne National Laboratory)
    Design of Precision Machines and Instruments II/Oral/Abstract/2009 Annual

Session IX Applications of Precision Engineering in Manufacturing II
Thursday, October 8, 2009, 1:30 pm - 3:00 pm
Session Chair: David D. Gill (Sandia National Laboratories) and Luis A. Aguirre (3M Company)

  1. Optical and Fiducial Fabrication with a Fast Long Range Actuator (FLORA)
    Chen, Q.; Dow, T. A.; Garrard, K. P.; Sohn, A. (North Carolina State University)
    Applications of Precision Engineering in Manufacturing II/Oral/Abstract/2009 Annual
  2. The Milling Dynamics “Super Diagram”: Combining Stability, Surface Location Error, Tool Wear, and Uncertainty
    Karandikar, J.; Zapata, R. E.; Schmitz, T. L. (University of Florida)
    Applications of Precision Engineering in Manufacturing II/Oral/Abstract/2009 Annual
  3. Machine Tool Performance Requirements Associated with Modulated Tool-path Chip Breaking
    Barkman, W. E.; Babelay, E. F. (Applied Technologies); Smith, K. S.; Woody, B. A.; Tursky, D. A.; Assaid, T.S. (University of North Carolina at Charlotte); and Adams, D. J. (Moore Nanotechnology Systems)
    Applications of Precision Engineering in Manufacturing II/Oral/Abstract/2009 Annual
  4. The Influence of Machining Parameters and Tool Geometry on the Quality of Information Carrying Microstructures
    Denkena, B.; de Leon, L.; Steinbrenner, I. (Leibniz Universität Hannover)
    Applications of Precision Engineering in Manufacturing II/Oral/Abstract/2009 Annual
  5. Metallographic Orientation Effects on Burr Formation in Machining Oxygen-free Copper Using Single Crystalline Diamond Micro-tools
    Ding, X.; Lim, G. C.; Liu, Y. C; Shaw, K. C.; Zheng, H. Y. (Singapore Institute of Manufacturing Technology (SIMTech)); and Butler, D. L. (Nanyang Technological University)
    Applications of Precision Engineering in Manufacturing II/Oral/Abstract/2009 Annual

Poster Session I
Tuesday, October 6, 2009, 3:30 pm - 5:00 pm
Session Chair: Robert D. Grejda (Corning Tropel Corporation) and Alex Sohn (North Carolina State University)

Applications of Precision Engineering in Manufacturing

  1. Reconfigurable Assembly Station for Precision Manufacture of Nuclear Fusion Ignition Targets
    Castro, C.; Montesanti, R. C.; Taylor, J. S.; Hamza, A. V.; Dzenitis, E. G. (Lawrence Livermore National Laboratory)
    Applications of Precision Engineering in Manufacturing/Poster/Abstract/2009 Annual
  2. Fabrication of a Precision Engineered Material by Micro-Wire EDM
    Gill, D. D.; Dohner, J. L.; Vangoethem, D. J.; Saavedra, M. P. (Sandia National Laboratories)
    Applications of Precision Engineering in Manufacturing/Poster/Abstract/2009 Annual
  3. Fabrication of a New Three Dimensional Position Surveying System for the Underground Long Distance Pipes Using Four Rotary Encoders
    Hamano, T.; Kato, S. (Nippon Institute of Technology); and Ono, M. (Tokyo Metropolitan College of Industrial Technology)
    Applications of Precision Engineering in Manufacturing/Poster/Abstract/2009 Annual
  4. An Analytical Model for the Orbital Drilling and Its Applicability
    Ishibashi, T.; Tanaka, H.; Yanagi, K. (Nagaoka University of Technology)
    Applications of Precision Engineering in Manufacturing/Poster/Abstract/2009 Annual
  5. Redundancy Method for the Separation of Machine and Triggering Probe Errors in Small Volume Measurement on a CMM
    Nafi, A.; Mayer, J. R. R. (Ecole Polytechnique de Montreal); and Wozniak, A. (Warsaw University of Technology)
    Applications of Precision Engineering in Manufacturing/Poster/Abstract/2009 Annual
  6. Fabrication of Pt/C Multilayer-Coated Thin Foil Mirrors for Hard X-Ray Telescope Loaded in ASTRO-H Satellite
    Namba, Y.; Cao, G.; Shinozaki, A. (Chubu University); and Kunieda, H.; Ogasaka, Y.; Yamashita, K. (Nagoya University)
    Applications of Precision Engineering in Manufacturing/Poster/Abstract/2009 Annual
  7. The Latest Application Technologies in Micro EDM
    Nemoto, M. (Makino Milling Machine Co., Ltd); and Bradford, J. W.; Salmon, N. J. (Hummingbird Precision Machine Co.)
    Applications of Precision Engineering in Manufacturing/Poster/Abstract/2009 Annual
  8. Application of Receptance Coupling to Torsional and Axial Frequency Response Prediction
    Schmitz, T. L.; Graziano, A. (University of Florida)
    Applications of Precision Engineering in Manufacturing/Poster/Abstract/2009 Annual
  9. Reduction in Surface Roughness of High Carbon Steel Using Pulse Electrochemical Machining
    Siems, D. W.; Sundaram, M. M.; Rajurkar, K. P. (University of Nebraska-Lincoln)
    Applications of Precision Engineering in Manufacturing/Poster/Abstract/2009 Annual
  10. Micromilling of Molds for Microfluidic Blood Diagnostic Devices
    Sodemann, A.; Li, M.; Mayor, J. R.; Forest, C. R. (Georgia Institute of Technology)
    Applications of Precision Engineering in Manufacturing/Poster/Abstract/2009 Annual
  11. Vibration Isolation System with High Accurate Positioning Technology of Semiconductor Lithograph Machine
    Takahashi, M.; Makinouchi, S. (Nikon Corporation); and Wakui, S. (Tokyo University of Agriculture and Technology)
    Applications of Precision Engineering in Manufacturing/Poster/Abstract/2009 Annual
  12. Determining Tool Diameter for Machining of Surface Texture
    Tominaga, Y.; Kobayashi, Y.; Shirai, K. (Nihon University)
    Applications of Precision Engineering in Manufacturing/Poster/Abstract/2009 Annual
  13. Developing a Predictive Model for Milling Stability
    Traverso, M. G. ; Abbas, A. E. (University of Illinois at Urbana-Champaign); and Zapata, R. E.; Schmitz, T. L. (University of Florida)
    Applications of Precision Engineering in Manufacturing/Poster/Abstract/2009 Annual

Control of Precision Machines and Processes

  1. Friction Modeling of Linear Rolling Element Bearings in High Precision Linear Stages
    Bucci, B. A.; Cole, D. G.; Vipperman, J. S. (Univerity of Pittsburgh); and Ludwick, S. J. (Aerotech, Inc.)
    Control of Precision Machines and Processes/Poster/Abstract/2009 Annual
  2. Accurate Control Ball Screw Drives Using Pole-placement Based Vibration Damping and Optimized Trajectory Pre-filtering
    Gordon, D. J.; Erkorkmaz, K. (University of Waterloo)
    Control of Precision Machines and Processes/Poster/Abstract/2009 Annual
  3. Application of an Active Clamping System in Wood Machining
    Hoffmeister, H.-W.; Loeis, K.; Schuller, B.-C. (Technical University of Braunschweig)
    Control of Precision Machines and Processes/Poster/Abstract/2009 Annual
  4. A Study on Design of Controllers for Six Degree of Freedom Active Vibration Isolation System
    Kim, H. C.; Kim, J.-J.; Gweon, D.-G. (Korea Advanced Institute of Science and Technology (KAIST))
    Control of Precision Machines and Processes/Poster/Abstract/2009 Annual
  5. Tracking Control of the Ball Bearing Guided Linear Stage in High Vacuum
    Shim, J. Y.; Khim, G.; Hwang, J.; Song, J. Y.; Park, C. H. (Korea Institute of Machinery & Materials (KIMM))
    Control of Precision Machines and Processes/Poster/Abstract/2009 Annual


Design and Fabrication of Structured Surfaces

  1. Preparation of Titanium Nitride - Molybdenum Disulfide Composite Thin Films with Low Frictional Properties
    Kohzaki, M. (Tokai University)
    Design and Fabrication of Structured Surfaces/Poster/Abstract/2009 Annual
  2. Femtosecond Laser Ablation of Sapphire
    Qi, L.; Namba, Y. (Chubu University), and Nishii, K.; Yasui, M.; Aoki, H. (Brother Industries, LTD.)
    Design and Fabrication of Structured Surfaces/Poster/Abstract/2009 Annual


Design of Precision Machines and Instruments

  1. High-Accuracy Atomic Force Microscope for Dimensional Metrology (II)
    Amin-Shahidi, D.; Ljubicic, D. M.; Trumper, D. L. (Massachusetts Institute of Technology); and Overcash, J. L.; Hocken, R. J. (University of North Carolina at Charlotte)
    Design of Precision Machines and Instruments/Poster/Abstract/2009 Annual
  2. Design of Micro-scale Multi-axis Force Sensors for Precision Applications
    Cullinan, M. A.; Panas, R. M.; Culpepper, M. L. (Massachusetts Institute of Technology)
    Design of Precision Machines and Instruments/Poster/Abstract/2009 Annual
  3. Dynamical Non-contact Exhaustion Pipe for Vacuum Compatible Air Guided Stages
    Heidler, N.; Tünnermann , A. (Friedrich-Schiller University); Schenk, C.; Harnisch, G.; Risse S.; Eberhardt, R. (Fraunhofer Institute for Applied Optics and Precision Engineering IOF); and Schubert, G. (Vistec Electron Beam GmbH Jena)
    Design of Precision Machines and Instruments/Poster/Abstract/2009 Annual
  4. The Measurement of Meso-scale Torsion Springs
    Jared, B. H.; Gill, D. D. (Sandia National Laboratories)
    Design of Precision Machines and Instruments/Poster/Abstract/2009 Annual
  5. Design and Control of a Nano-precision Multi-axis Vertical Mask Aligner
    Kim, H.-Y.; Gweon, D.-G.; Kim, J.-J.; Ahn, D. H. (Korea Advanced Institute of Science and Technology (KAIST))
    Design of Precision Machines and Instruments/Poster/Abstract/2009 Annual
  6. Design and Testing of a Step Compensated Bi-conic Hydrostatic Spindle
    Knapp, B. R.; Arneson, D. A.; Liebers, M. J.; Oss, D. D. (Professional Instruments Company, Inc.); and Marsh, E. R. (The Pennsylvania State University)
    Design of Precision Machines and Instruments/Poster/Abstract/2009 Annual
  7. Instrument for Gauging Large Rings, Cups, and Cones
    Lee, V.; Ziegert, J.C. (Clemson University)
    Design of Precision Machines and Instruments/Poster/Abstract/2009 Annual
  8. Kinematic and Dynamic Behavior of a Wearing Joint in a Crank-slider Mechanism
    Mauntler, N. A.; Mukras, S. M.; Kim, N.-H.; Sawyer, W. G.; Schmitz, T L. (University of Florida)
    Design of Precision Machines and Instruments/Poster/Abstract/2009 Annual
  9. Laboratory Demonstration System for Precision Engineering Education
    Mysore, A. V. (Angle Systems LLC); and Furman, B. J.; Gonsalves, S.; Sampson, N. (San José State University)
    Design of Precision Machines and Instruments/Poster/Abstract/2009 Annual
  10. Development of a Metrological Nanoindenter
    Nowakowski, B. K.; Smith, S. T. (University of North Carolina at Charlotte); and Smith, D. T.; Morris, D. J. (National Institute of Standards and Technology)
    Design of Precision Machines and Instruments/Poster/Abstract/2009 Annual
  11. A Microactuator Based on an Inchworm with Friction Control Device
    Torii, A.; Banno, M.; Ueda, A.; Doki, K. (Aichi Institute of Technology)
    Design of Precision Machines and Instruments/Poster/Abstract/2009 Annual
  12. Error Budget of On-machine Measurement System for Micro/Nano Milling Process
    Zhang, X.; Wang, Z.; Yamazaki, K. (University of California-Davis)
    Design of Precision Machines and Instruments/Poster/Abstract/2009 Annual
  13. Improving the Accuracy of a 6-DOF Displacement/Orientation Sensor for Heavy Truck K&C Testing
    Ziegert, J. C.; Hofmeier, P. (Clemson University); and Yount, W.; Frey, N.; McKibben, D. (Michelin Americas Research Company)
    Design of Precision Machines and Instruments/Poster/Abstract/2009 Annual

Dimensional Metrology

  1. Diameter and Form Measurement of a Micro-hole in a Fuel Injector Nozzle with the NIST Fiber Probe
    Muralikrishnan, B.; Stone Jr., J. A.; Stoup, J. R. (National Institute of Standards and Technology)
    Dimensional Metrology/Poster/Abstract/2009 Annual
  2. Precision Measurement of Parallelism and Orthogonality on Multi-axis Micro Measurement System
    Ogura, I.; Okazaki, Y. (National Institute of Advanced Industrial Science and Technology (AIST)); Ahn, D. H. (Korea Advanced Institute of Science and Technology (KAIST)); and Yoden, H. (Industrial Technology Center of Okayama Prefecture)
    Dimensional Metrology/Poster/Abstract/2009 Annual
  3. Corrected Measured Point Validity Check in Coordinate Metrology
    Wozniak, A. (Warsaw University of Technology); and Mayer, J. R. R. (École Polytechnique de Montréal)
    Dimensional Metrology/Poster/Abstract/2009 Annual

Micro-Electromechanical Devices

  1. Development of Micro Mechanical Parts Utilized Extra Fine Metallic Wires or Ceramic Threads
    Honda, S. (Tokyo Metropolitan University)
    Micro-Electromechanical Devices/Poster/Abstract/2009 Annual
  2. Fabrication of a Microrobot Observable in an Artificial Human's Large Intestine Model
    Kato, S.; Goto, Y.; Hamano, T. (Nippon Institute of Technology); and Ono, M. (Tokyo Metropolitan College of Industrial Technology)
    Micro-Electromechanical Devices/Poster/Abstract/2009 Annual

Nanotechnology

  1. Macroscopic Transfer Artifact for Nano-positioning
    Lemmons, T. D.; Hocken, R. J.; Overcash, J. L. (University of North Carolina at Charlotte)
    Nanotechnology/Poster/Abstract/2009 Annual
  2. Process Modeling of Dip Pen Nanolithography Line Writing for Accurate Line Width Control in Nanomanufacturing
    Saha, S. K.; Culpepper, M. L. (Massachusetts Institute of Technology)
    Nanotechnology/Poster/Abstract/2009 Annual

Poster Session II
Wednesday, October 7, 2009, 3:30 pm - 5:00 pm
Session Chair: Brian P. O'Connor (Aerotech, Inc.) and Senajith B. Rekawa (Lawrence Berkeley National Laboratory)

Grinding, Polishing, and Lapping

  1. Evaluation of a Prototype CMP Machine for Improving the Global Planarization by MEMS
    Cvetkovic, S.; Gatzen, H. H. (Leibniz Universität Hannover)
    Grinding, Polishing and Lapping/Poster/Abstract/2009 Annual
  2. In Process Grinding Wheel Surface Inspection Using Machine Vision
    Deakyne, T. R.; Marsh, E. R.; Sommer, E. J.; (The Pennsylvania State University); and Arneson, D. A. (Professional Instruments Company, Inc.)
    Grinding, Polishing and Lapping/Poster/Abstract/2009 Annual
  3. Mechanochemical Superfinishing of Optical Glass - Scratchless Surface Finishing Process -
    Furushiro, N.; Higuchi, M.; Yamaguchi, T. (Kansai University); Matsumori, N.; Ogura, H. (Mizuho Co., Ltd.); and Shimada, S. (Osaka Electro-Communication University)
    Grinding, Polishing and Lapping/Poster/Abstract/2009 Annual
  4. Finishing of CaF2-Glass with a Novel Fine Grinding Concept
    Hoffmeister, H.-W.; Hahmann, W.-C. (Technical University of Braunschweig)
    Grinding, Polishing and Lapping/Poster/Abstract/2009 Annual
  5. ELID Grinding Effects on Fabrication of Advanced Ceramics Components
    Katahira, K.; Ohmori, H.; Kasuga, H. (The Institute of Physical and Chemical Research (RIKEN)); Yoshida, K.; Hirai, S.(Institute of Technologists)
    Grinding, Polishing and Lapping/Poster/Abstract/2009 Annual
  6. Steady-State Dynamic Testing of Polishing Pitch
    Mullany, B. A.; Turner, S.; Corcoran, E. (University of North Carolina at Charlotte)
    Grinding, Polishing and Lapping/Poster/Abstract/2009 Annual
  7. Rapid On-machine Measurement of Surface Finish for Cylindrically Grinding Workpiece
    Ohashi, K.; Tago, M.; Tachikawa, T.; Tsukamoto, S. (Okayama University)
    Grinding, Polishing and Lapping/Poster/Abstract/2009 Annual
  8. 3D Structure and Surface Topography Models of the Mechano-chemical Composite Grinding Wheel by Fractal Modeling Technique
    Yamaguchi, T.; Higuchi, M.; Furushiro, N.; Oda, H. (Kansai University); Shimada, S. (Osaka Electro- Communication University); and Matsumori, N.; Ogura, H. (Mizuho Co., Ltd.)
    Grinding, Polishing and Lapping/Poster/Abstract/2009 Annual

Machine Tool Metrology

  1. Least Square Estimation of Harmonic Components in Radial Error Measurement of a Miniaturized Machine Tool Spindle
    Ashok, S. D.; Samuel, G. L. (Indian Institute of Technology Madras)
    Machine Tool Metrology/Poster/Abstract/2009 Annual
  2. Compensation for the Unknown Geometry of a Reconfigurable Uncalibrated 3D Ball Artefact for Five-axis Machine Volumetric Check
    Erkan, T.; Mayer, J. R. R. (École Polytechnique de Montréal); and Dupont , Y. (Pratt and Whitney Canada)
    Machine Tool Metrology/Poster/Abstract/2009 Annual
  3. Development of Optical Skid Sensor for Accuracy Improvement of Machine Tool
    Fukuda, Y.; Yazawa, T.; Ogiya, Y.; Kojima, T. (Nagasaki University); Maeda, Y. (Toyama Prefectural University); and Tamura, T. (WAIDA MFG. CO., Ltd.)
    Machine Tool Metrology/Poster/Abstract/2009 Annual
  4. Self-Calibration for Precision Encoders
    Graetz, R.; Amin-Shahidi, D.; Smeds, K.; Lu, X. (The University of British Columbia)
    Machine Tool Metrology/Poster/Abstract/2009 Annual
  5. Evaluation Method for Multi-axis Errors of a 4 Axis Machine Tool
    Hwang, J.; Park, C.-H.; Lee, C.-H. (Korea Institute of Machinery and Materials (KIMM)); and Bui, C. B. (University of Science and Technology)
    Machine Tool Metrology/Poster/Abstract/2009 Annual
  6. A New Method for Characterizing Spindle Radial Error Motion: Two- Dimensional Point of View
    Lu, X.; Jamalian, A.; Graetz, R. (The University of British Columbia)
    Machine Tool Metrology/Poster/Abstract/2009 Annual
  7. Concurrent Measurement Method for Spindle Radial, Axial and Angular Motions Using Concentric Grating Interferometer
    Madden, M.; Aketagawa, M.; Ohkubo, Y.; Kimura, S. (Nagaoka University of Technology); and Okuyama, E. (Akita University)
    Machine Tool Metrology/Poster/Abstract/2009 Annual
  8. Synchronous Motion of Spindles
    Montgomery, D. T. (Kodak Graphic Communications Canada Company)
    Machine Tool Metrology/Poster/Abstract/2009 Annual
  9. Diamond Tool Wear Measurement by EBID
    Shi, M.; Lane, B.; Mooney, C. B.; Dow, T. A.; Scattergood, R. O. (North Carolina State University)
    Machine Tool Metrology/Poster/Abstract/2009 Annual

Novel Equipment And Processes

  1. Nano Imprinting System Operated by Multiple Micro Robots
    Aoyama, H.; Hata, N.; Suzuki, Y. (University of Electro-Communications); Iwata, F. (Shizuoka University); and Ota, A.; Usuda, T. (National Institute of Advanced Industrial Science and Technology)
    Novel Equipment and Processes/Poster/Abstract/2009 Annual
  2. New Mechanical Pretreatment Process for Thermally Sprayed Aluminum Crankcases
    Hoffmeister, H.-W.; Schnell, C. (Technical University of Braunschweig)
    Novel Equipment and Processes/Poster/Abstract/2009 Annual
  3. Grinding Hard and Brittle Materials with CVD-Diamond Microgrinding Wheels
    Hoffmeister, H.-W.; Wittmer, R. (Technical University of Braunschweig)
    Novel Equipment and Processes/Poster/Abstract/2009 Annual
  4. Study of Tool Wear and Cutting Process of Elliptical Vibration Assisted Machining
    Lane, B. M.; Shi, M.; Dow, T. A.; Scattergood, R. O. (North Carolina State University)
    Novel Equipment and Processes/Poster/Abstract/2009 Annual
  5. Proposal of a Snake Type In-pipe Mobile Robot Using Pneumatic Actuators
    Ono, M.; Ito, S.; Sakamoto, M. (Tokyo Metropolitan College of Industrial Technology); and Kato, S. (Nippon Institute of Technology)
    Novel Equipment and Processes/Poster/Abstract/2009 Annual
  6. Combined Micro Milling and Laser Ablation Processes in a Hybrid Machining System
    Uhlmann, E.; Eßmann, J. (Fraunhofer Institute Production Systems and Design Technology (IPK))
    Novel Equipment and Processes/Poster/Abstract/2009 Annual

Optics and Interferometry

  1. Constant Temperature/"Air-refractive-index" Chamber for Precise Interferometer
    Banh, Q. T.; Ohkubo, Y.; Aketagawa, M. (Nagaoka University of Technology)
    Optics and Interferometry/Poster/Abstract/2009 Annual
  2. Magnetic Field Effects on the Secondary Beat Fequency Profile for Three Mode HeNe Laser Stabilization
    Ellis, J. D.; Joo, K.-N.; Buice, E. S.; Spronck, J. W.; Munnig Schmidt, R.-H. (Delft University of Technology)
    Optics and Interferometry/Poster/Abstract/2009 Annual
  3. Improved Saunders Method Using Lateral Shearing Interferomgrams Obtained by Several Different Shears
    Kamiya, K.; Kitano, M.; Nomura, T. (Toyama Prefectural University); and Tashiro, H. (Toyama University)
    Optics and Interferometry/Poster/Abstract/2009 Annual
  4. Size Reduction of Acousto-optic Modulator-based Heterodyne Displacement Measuring Interferometer (AOM DMI)
    Kim, H. S.; Schmitz, T. L.; Rueff, M. C. (University of Florida)
    Optics and Interferometry/Poster/Abstract/2009 Annual

Precision Fabrication and Assembly

  1. Robust Gate System Design for Precision Semi-solid Casting Processes
    Chung, S.-C. (Hanyang University)
    Precision Fabrication and Assembly/Poster/Abstract/2009 Annual
  2. Precision Embossing of Molds and Dies by Automatic Boundary Tracking of Complex Images
    Chung, S.-C. (Hanyang University)
    Precision Fabrication and Assembly/Poster/Abstract/2009 Annual
  3. Challenges in Assembling a Magnetic Shape Memory (MSM) Microactuator
    Cvetkovic, S.; Spasova, B.; Gatzen, H. H. (Leibniz Universität Hannover)
    Precision Fabrication and Assembly/Poster/Abstract/2009 Annual
  4. Diamond Tool Centering for Cylindrical Turning
    Sohn, A. (North Carolina State University)
    Precision Fabrication and Assembly/Poster/Abstract/2009 Annual

Scanning Probe Microscopy

  1. Validation of Cantilever Shape Analysis for Force Measurement
    Kumanchik, L.; Schmitz, T. L. (University of Florida); and Pratt, J. R. (National Institute of Standards and Technology)
    Scanning Probe Microscopy/Poster/Abstract/2009 Annual

Surface Metrology

  1. Influence of Alignment Error Between Two Laser Beams on Straightness Measurement Using In-situ Differential Laser Auto-collimation Method
    Uda, Y.; Shimada, S. (Osaka Electro-Communication University); and Go, Y. (Nagase Integrex Co., Ltd.)
    Surface Metrology/Poster/Abstract/2009 Annual

Ultraprecision Machining

  1. Machining Processes for Precision Molds
    Brinksmeier, E.; Riemer, O.; Osmer, J.; Twardy, S.; Rickens, K. (University of Bremen)
    Ultraprecision Machining/Poster/Abstract/2009 Annual
  2. Metallographic Structure Effects on the Machined Surface Integrity in Micro-machining with Al 6061-T6
    Ding, X.; Lee, L. C.; Liu, Y. C.; Shaw, K. C.; Zheng, H. Y. (Singapore Institute of Manufacturing Technology (SIMTech)); and Butler, D. L. (Nanyang Technological University)
    Ultraprecision Machining/Poster/Abstract/2009 Annual
  3. The Crystallographic Direction Influence on the Brittle to Ductile Transition in Diamond Turning of Silicon Crystal
    Jasinevicius, R. G.; Duduch, J. G. (Universidade de São Paulo); and Pizani, P. S. (Universidade Federal de São Carlos)
    Ultraprecision Machining/Poster/Abstract/2009 Annual
  4. Ultraprecision Micro-machining of Diffractive Optics
    Ohmori, H.; Maekawa, K.; Hachisu, Y.; Katahira, K.; Takizawa, Y. (The Institute of Physical and Chemical Research (RIKEN)); Takahashi, Y. (University of Alabama at Huntsville); and Young, R. (NASA/Marshall Space Flight Center)
    Ultraprecision Machining/Poster/Abstract/2009 Annual
  5. Ultra-Precision Grinding of PMN-PT Relaxor-based Ferroelectric Single Crystals
    Takahashi, H.; Namba, Y. (Chubu University)
    Ultraprecision Machining/Poster/Abstract/2009 Annual
  6. Technological Investigations on Slow Slide Servo for Ultra Precise Freeform Machining
    Uhlmann, E.; Kurz, M. (Technical University Berlin); and Essmann, J.; Oberschmidt, D. (Fraunhofer Institut für Produktionsanlagen und Konstruktionstechnik IPK)
    Ultraprecision Machining/Poster/Abstract/2009 Annual
  7. Modeling of Minimum Chip Thickness in Micromachining of Hard Tool Steels with the Modified Slip Line Model
    Wang, Z. G.; Cheng, X.; Yamazaki, K. (University of California, Davis); and Nakamoto, K.; Kobayashi, S. (Sodick Co. Ltd.)

    Ultraprecision Machining/Poster/Abstract/2009 Annual