Vibration Isolation, Active and Passive – Parts 1 & 2
Jan van Eijk, MICE bv and Delft University of Technology and Adrian Rankers
Monday, October 22, 2012
8:00 AM – 5:30 PM

How do you select a good industrial solution for optimal precision in the presence of dynamic disturbances?

Vibrations of Machine Frames lead to reduced position performance and increased settling times. Many sources of vibrations may occur. For extreme situations as the LIGO and VIRGO gravitational observatories extensive solutions with combined active and passive stages are used.

For industrial systems, designers have to find a good balance where performance is obtained at an acceptable level of effort and costs. In this tutorial the various aspects will be treated in a comprehensive way. It will include modeling of sensitivity, characterization of disturbances, performance of sensors and controllers, dynamic error budgeting and the many opportunities and pitfalls of passive and active isolation systems.

The participants will be actively involved in practicing the different elements. At the end of the day successful participants will be able to make well founded selections for their vibration isolation systems.

The Tutors
Prof. Jan van Eijk and Dr. Adrian Rankers have been involved in the design, development and analysis of Vibration Isolation Systems in industrial applications for more than 25 years. Both worked at Philips Centre for Technology and from there supported the creation of the passive and active systems for companies like ASML. The suspensions for systems like electron microscopes (FEI) and pick-and-place equipment (Assembleon) have broadened the knowledge base. Continued research at Philips and at the Delft University of Technology have created an in-depth knowledge and understanding of the promises and problems associated with the different solutions.

Jan van Eijk worked for Philips for about 23 years. In 2000 he became a part-time professor for Advanced Mechatronics at the Delft University of Technology. Since 2007 he is active as an independent consultant in the field of Precision Systems from his company Mechatronic Innovation and Concept Engineering (MICE bv). Since about 25 years he is active in training of engineers in industry. Initially this was done through the Philips training center. Recently this program was transferred to the HIGH TECH INSTITUTE where the courses are now continued.

Adrian Rankers worked for Philips for more than 25 years. During that time (1997) he completed a PhD-thesis on Machine Dynamics in Mechatronic Systems, which was based on his work for lithography equipment and optical disc drives. For many years he has been active in Mechatronics training at Philips but also in ASPE and EUSPEN tutorials. In 2008 he became board member of the Dutch Society for Precision Engineering (DSPE). Since two years he works as an independent  consultant and trainer in the field of Precision Mechatronics and heads the corresponding training program of the HIGH TECH INSTITUTE.

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